OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C279–C285

Evaluation and analysis of polished fused silica subsurface quality by the nanoindenter technique

Bin Ma, Zhengxiang Shen, Pengfei He, Fei Sha, Chunliang Wang, Bin Wang, Yiqin Ji, Huasong Liu, Weihao Li, and Zhanshan Wang  »View Author Affiliations


Applied Optics, Vol. 50, Issue 9, pp. C279-C285 (2011)
http://dx.doi.org/10.1364/AO.50.00C279


View Full Text Article

Enhanced HTML    Acrobat PDF (797 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We evaluate the subsurface quality of polished fused silica samples using the nanoindenter technique. Two kinds of samples, consisting of hundreds of nanometers and micrometers of subsurface damage layers, are fabricated by controlling the grinding and polishing processes, and the subsurface quality has been verified by the chemical etching method. Then several nanoindentation experiments are performed using the Berkovich tip to investigate the subsurface quality. Some differences are found by relative measurements in terms of the relationship between the total penetration and the peak load on the surfaces, the modulus calculated over the defined depths and from unload, and the indented morphology at a constant load near the surface collapse threshold. Finally, the capabilities of such a mechanical method for detecting subsurface flaws are discussed and analyzed.

© 2011 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(230.1150) Optical devices : All-optical devices

History
Original Manuscript: August 2, 2010
Revised Manuscript: November 20, 2010
Manuscript Accepted: December 6, 2010
Published: January 18, 2011

Citation
Bin Ma, Zhengxiang Shen, Pengfei He, Fei Sha, Chunliang Wang, Bin Wang, Yiqin Ji, Huasong Liu, Weihao Li, and Zhanshan Wang, "Evaluation and analysis of polished fused silica subsurface quality by the nanoindenter technique," Appl. Opt. 50, C279-C285 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-9-C279

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited