|
|
Instrument for close-to-process light scatter measurements of thin film coatings and substrates |
Applied Optics, Vol. 50, Issue 9, pp. C321-C328 (2011)
http://dx.doi.org/10.1364/AO.50.00C321
Enhanced HTML
Acrobat PDF (756 KB)
Abstract
Scatter analysis is an effective method for the characterization of thin film components. The new highly sensitive table top system ALBATROSS-TT (3D-Arrangement for Laser Based Transmittance, Reflectance and Optical Scatter Measurement—Table Top) has been developed at the Fraunhofer Institute in Jena to meet the specific requirements for close-to-process applications. Extremely high sensitivity with a noise equivalent angle resolved scatter level of
© 2011 Optical Society of America
OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.5770) Optics at surfaces : Roughness
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements
(310.0310) Thin films : Thin films
History
Original Manuscript: July 30, 2010
Revised Manuscript: December 10, 2010
Manuscript Accepted: December 10, 2010
Published: January 28, 2011
Citation
Alexander von Finck, Matthias Hauptvogel, and Angela Duparré, "Instrument for close-to-process light scatter measurements of thin film coatings and substrates," Appl. Opt. 50, C321-C328 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-9-C321
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription





OSA is a member of 