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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C321–C328

Instrument for close-to-process light scatter measurements of thin film coatings and substrates

Alexander von Finck, Matthias Hauptvogel, and Angela Duparré  »View Author Affiliations

Applied Optics, Vol. 50, Issue 9, pp. C321-C328 (2011)

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Scatter analysis is an effective method for the characterization of thin film components. The new highly sensitive table top system ALBATROSS-TT (3D-Arrangement for Laser Based Transmittance, Reflectance and Optical Scatter Measurement—Table Top) has been developed at the Fraunhofer Institute in Jena to meet the specific requirements for close-to-process applications. Extremely high sensitivity with a noise equivalent angle resolved scatter level of 2 × 10 8     sr 1 , full three-dimensional spherical measurement capability, and an instrument size as small as 0.8 m × 0.8 m × 0.8 m have been achieved. Details of specifications, optical components, and software are presented, including a comparison to our laboratory system. Anisotropy analysis of diamond-turned aluminum substrates as well as substrate and coating characterization are demonstrated as examples of application.

© 2011 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.5770) Optics at surfaces : Roughness
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements
(310.0310) Thin films : Thin films

Original Manuscript: July 30, 2010
Revised Manuscript: December 10, 2010
Manuscript Accepted: December 10, 2010
Published: January 28, 2011

Alexander von Finck, Matthias Hauptvogel, and Angela Duparré, "Instrument for close-to-process light scatter measurements of thin film coatings and substrates," Appl. Opt. 50, C321-C328 (2011)

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  1. J. Stover, Optical Scattering—Measurement and Analysis, 2nd ed. (SPIE, 1995). [CrossRef]
  2. J. Bennett and L. Mattson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, 1999).
  3. A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. Bennett, “Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components,” Appl. Opt. 41, 154–171 (2002). [CrossRef] [PubMed]
  4. J. Elson and J. Bennett, “Relation between the angular dependence of scattering and the statistical properties of optical surfaces,” J. Opt. Soc. Am. 69, 31–47 (1979). [CrossRef]
  5. S. Schröder, A. Duparré, and A. Tünnermann, “Roughness evolution and scatter losses of multilayers for 193 nm optics,” Appl. Opt. 47, C88–C97 (2008). [CrossRef] [PubMed]
  6. S. Schröder, T. Herffurth, H. Blaschke, and A. Duparré, “Angle-resolved scattering: an effective method for characterizing structural and alteration effects in thin film coatings,” Appl. Opt. 50, C164–C171 (2011). [CrossRef] [PubMed]
  7. D. Cheever, F. Cady, K. A. Klicker, and J. C. Stover, “Design review of a unique complete angle-scatter instrument (CASI),” Proc. SPIE 818, 13–20 (1987).
  8. S. Schröder, T. Herffurth, M. Trost, and A. Duparré, “Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis,” Appl. Opt. 49, 1503–1512 (2010). [CrossRef] [PubMed]
  9. S. Schröder, S. Gliech, and A. Duparré, “Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions,” Appl. Opt. 44, 6093–6107 (2005). [CrossRef] [PubMed]
  10. M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “A goniometric instrument for a spatially resolved scattering and polarimetric characterization of optical coatings,” in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper ThD7.
  11. C. Amra, D. Torricini, and P. Roche, “Multiwavelength (0.45–10.6 μm) angle-resolved scatterometer or how to extend the optical window,” Appl. Opt. 32, 5462–5474 (1993). [CrossRef] [PubMed]
  12. P. Kadkhoda, H. Madebach, and D. Ristau, “Angle resolved scatter measurements on optical components,” Proc. SPIE 5965, 59651A (2005). [CrossRef]
  13. F. Leloup, S. Forment, P. Dutré, M. Pointer, and P. Hanselaer, “Design of an instrument for measuring the spectral bidirectional scatter distribution function,” Appl. Opt. 47, 5454–5467(2008). [PubMed]
  14. R. White, P. Saunders, S. Bonsey, J. Ven, and H. Edgar, “Reflectometer for measuring the bidirectional reflectance of rough surfaces,” Appl. Opt. 37, 3450–3454 (1998). [CrossRef]
  15. F. Cady, D. Bjork, J. Rifkin, and J. Stover, “BRDF error analysis,” Proc. SPIE. 1165, 154–164 (1989).
  16. “Spectralon diffuse reflectance standards” (Labsphere, Inc., 2010), http://www.labsphere.com.
  17. C. Asmail, J. Hsia, A. Parr, and J. Hoeft, “Rayleigh scattering limits for low-level bidirectional reflectance distribution function measurements,” Appl. Opt. 33, 6084–6091 (1994). [CrossRef] [PubMed]
  18. C. Asmail, A. Parr, and J. Hsia, “Rayleigh scattering limits for low-level bidirectional reflectance distribution function measurements: corrigendum,” Appl. Opt. 38, 6027–6028 (1999). [CrossRef]
  19. K. Klicker, J. Stover, D. Cheever, and F. Cady, “Practical reduction of instrument signature in near specular light scatter measurements,” Proc. SPIE 818, 26–33 (1987).
  20. T. Schiff, J. Stover, D. Cheever, and D. Bjork, “Maximum and minimum limitations imposed on BSDF measurements,” Proc. SPIE 967, 50–57 (1988).
  21. M. Trost, S. Schröder, T. Feigl, and A. Duparré, “Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50, C148–C153(2011). [CrossRef] [PubMed]
  22. J. Elson, J. Rahn, and J. Bennett, “Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties,” Appl. Opt. 22, 3207–3219(1983). [CrossRef] [PubMed]
  23. J. Elson and J. Bennett, “Calculation of the power spectral density from surface profile data,” Appl. Opt. 34, 201–208(1995). [CrossRef] [PubMed]
  24. Fabrication by P. Munzert, Fraunhofer Institute Jena
  25. O. Kienzle, J. Staub, and T. Tschudi, “Light scattering from transparent substrates: theory and experiment,” Phys. Rev. B 50, 1848–1860 (1994). [CrossRef]
  26. Fabrication by M. Rohde, Fraunhofer Institute Jena

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