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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C392–C395

Improvement of silicon solar cell efficiency by ion beam sputtered deposition of AlO x N y thin films

Sheng-Hui Chen, Chun-Che Hsu, Hsuan-Wen Wang, Chi-Li Yeh, Shao-Ze Tseng, Hung-Ju Lin, Cheng-Chung Lee, and Cheng-Yu Peng  »View Author Affiliations


Applied Optics, Vol. 50, Issue 9, pp. C392-C395 (2011)
http://dx.doi.org/10.1364/AO.50.00C392


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Abstract

Negative charge material, AlO x N y , has been fabricated to passivate the surface of p-type silicon. The fabrication of AlO x N y was possible by using ion beam sputtering deposition to deposit AlN thin film on the surface of a p-type silicon wafer and following annealing in oxygen ambient. Capacitance-voltage analysis shows the fixed charge density has increased from 10 11 cm 2 to 2.26 × 10 12 cm 2 after annealing. The solar cell efficiency increased from 15.9% to 17.3%, which is also equivalent to the reduction of surface recombination velocity from 1 × 10 5 to 32 cm/s.

© 2011 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6870) Thin films : Thin films, other properties

History
Original Manuscript: August 2, 2010
Revised Manuscript: December 22, 2010
Manuscript Accepted: December 27, 2010
Published: February 15, 2011

Citation
Sheng-Hui Chen, Chun-Che Hsu, Hsuan-Wen Wang, Chi-Li Yeh, Shao-Ze Tseng, Hung-Ju Lin, Cheng-Chung Lee, and Cheng-Yu Peng, "Improvement of silicon solar cell efficiency by ion beam sputtered deposition of AlOxNy thin films," Appl. Opt. 50, C392-C395 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-9-C392


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References

  1. B. Hoex, S. B. S. Heil, E. Langereis, M. C. M. van de Sanden, and W. M. M. Kessels, “Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited AlOxNy,” Appl. Phys. Lett. 89, 042112 (2006). [CrossRef]
  2. M. J. Stocks, A. Cuevas, and A. W. Blakers, “Minority carrier lifetimes of multicrystalline silicon during solar cell processing,” in Proceedings of the 14th European Photovoltaic Solar Energy Conference (European Commission Joint Research Centre, 1997), pp. 770–773.
  3. J. Benick, O. Schultz-Wittmann, J. Schön, and S. W. Glunz, “Surface passivation schemes for high-efficiency n-type Si solar cells,” Phys. Status Solidi 2, 145–147 (2008). [CrossRef]
  4. P. Saint-Cast, D. Kania, M. Hofmann, J. Benick, J. Rentsch, and R. Preu, “Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide,” Appl. Phys. Lett. 95, 151502 (2009). [CrossRef]
  5. J. P. Kar, G. Bose, and S. Tuli, “Effect of annealing on DC sputtered aluminum nitride films,” Surf. Coat. Technol. 198, 64–67 (2005). [CrossRef]
  6. P. A. Basore, D. T. Rover, and A. W. Smith, “PC-1D version 2: Enhanced numerical solar cell modelling,” in Proceedings of IEEE Conference on 20th IEEE Photovoltaic Specialists Conference (IEEE, 1988), pp. 389–396.
  7. K. Jang, S. Jung, and J. Lee, “Optical and electrical properties of negatively charged aluminium oxynitride films,” Thin Solid Films 517, 444–446 (2008). [CrossRef]
  8. S. N. Ghosh, I. O. Parm, S. K. Dhungel, K. S. Jang, S. W. Jeong, J. Yoo, S. H. Hwang, and J. Yi, “Field-induced surface passivation of p-type silicon by using AlON films,” Renewable Energy 33, 320–325 (2008). [CrossRef]
  9. B. Hoex, J. Schmidt, P. Pohl, M. C. M. van de Sanden, and W. M. M. Kessels, “Silicon surface passivation by atomic layer deposited Al2O3,” J. Appl. Phys. 104, 044903 (2008). [CrossRef]

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