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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C62–C68

Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee  »View Author Affiliations

Applied Optics, Vol. 50, Issue 9, pp. C62-C68 (2011)

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Composite films of Ta–Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing.

© 2011 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

Original Manuscript: July 21, 2010
Manuscript Accepted: September 21, 2010
Published: October 25, 2010

Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee, "Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering," Appl. Opt. 50, C62-C68 (2011)

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  1. W. H. Southwell, “Spectral response calculations of rugate filters using coupled-wave theory,” J. Opt. Soc. Am. A 5, 1558–1564 (1988). [CrossRef]
  2. W. J. Gunning, R. L. Hall, F. J. Woodberry, W. H., Southwell, and N. S. Gluck, “Codeposition of continuous composition rugate filters,” Appl. Opt. 28, 2945–2948 (1989). [CrossRef] [PubMed]
  3. A. Ritz, “TaTiOx layers prepared by magnetron sputtering from separate metal targets,” Surf. Coat. Technol. 174–175, 651–654 (2003). [CrossRef]
  4. Q. Tang, H. Matsuda, K. Kikuchi, and S. Ogura, “Fabrication and characteristics of rugate filters deposited by the TSH reactive sputtering method,” J. Vac. Sci. Technol. A 16, 3384–3388 (1998). [CrossRef]
  5. C. C. Lee, C. J. Tang, and J. Y. Wu, “Rugate filter made with composite thin films by ion-beam sputtering,” Appl. Opt. 45, 1333–1337 (2006). [CrossRef] [PubMed]
  6. C. C. Lee, H. L. Chen, J. C. Hsu, and C. L. Tien, “Interference coating based on synthesized silicon nitride,” Appl. Opt. 38, 2078–2082 (1999). [CrossRef]
  7. H. Bartzsch, S. Lange, P. Frach, and K. Goedicke, “Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering,” Surf. Coat. Technol. 180–181, 616–620 (2004). [CrossRef]
  8. J. C. Manifacier, J. Gasiot, and J. P. Fillard, “A simple method for the determination of the optical constant n, k and the thickness of the weakly absorbing thin film,” J. Phys. E 9, 1002–1004 (1976). [CrossRef]
  9. G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. London Ser. A 82, 172–175 (1909). [CrossRef]
  10. C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, “An apparatus for the measurement of internal stress and thermal expansion coefficient of metal oxide films,” Rev. Sci. Instrum. 72, 2128–2133 (2001). [CrossRef]
  11. C. C. Lee, H. C. Chen, and C. C. Jaing, “Investigation of thermal annealing of optical properties and residual stress of ion-beam-assisted TiO2 thin films with different substrate temperatures,” Appl. Opt. 45, 3091–3096 (2006). [CrossRef] [PubMed]
  12. J. Chastain and R. C. King, Handbook of X-Ray Photoelectron Spectroscopy (Physical Electronics, 1995), pp. 44–45, pp. 56–57, and pp. 170–171.
  13. D. R. Lide, CRC Handbook of Chemistry and Physics, 82nd ed. (CRC, 2001), Chap. 9, p. 75.
  14. C. J. Tang, C. C. Jaing, K. Wu, and C. C. Lee, “Residual stress of graded-index-like films deposited by radio frequency ion-beam sputtering, ” Thin Solid Films 517, 1746–1749 (2009). [CrossRef]

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