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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C90–C94

Reliable deposition of induced transmission filters with a single metal layer

Anna Sytchkova  »View Author Affiliations


Applied Optics, Vol. 50, Issue 9, pp. C90-C94 (2011)
http://dx.doi.org/10.1364/AO.50.000C90


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Abstract

The sensitivity of an induced transmission filter (ITF) design to deposition errors is analyzed for the case of a single metal layer ITF. Theoretical knowledge of the least and most sensitive layers within the ITF design improves deposition reliability when using broadband optical monitoring of only the dielectric part of such metal–dielectric filters. Linearly variable ITFs have been successfully fabricated using this developed approach for error compensation.

© 2011 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

History
Original Manuscript: August 2, 2010
Manuscript Accepted: August 27, 2010
Published: November 8, 2010

Citation
Anna Sytchkova, "Reliable deposition of induced transmission filters with a single metal layer," Appl. Opt. 50, C90-C94 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-9-C90


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