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Reliable deposition of induced transmission filters with a single metal layer |
Applied Optics, Vol. 50, Issue 9, pp. C90-C94 (2011)
http://dx.doi.org/10.1364/AO.50.000C90
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Abstract
The sensitivity of an induced transmission filter (ITF) design to deposition errors is analyzed for the case of a single metal layer ITF. Theoretical knowledge of the least and most sensitive layers within the ITF design improves deposition reliability when using broadband optical monitoring of only the dielectric part of such metal–dielectric filters. Linearly variable ITFs have been successfully fabricated using this developed approach for error compensation.
© 2011 Optical Society of America
OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
History
Original Manuscript: August 2, 2010
Manuscript Accepted: August 27, 2010
Published: November 8, 2010
Citation
Anna Sytchkova, "Reliable deposition of induced transmission filters with a single metal layer," Appl. Opt. 50, C90-C94 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-9-C90
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