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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 1 — Jan. 1, 2012
  • pp: 33–42

Regularized multiframe phase-shifting algorithm for three-dimensional profilometry

Fuqin Deng, Wui Fung Sze, Jiangwen Deng, Kenneth S. M. Fung, W. H. Leung, and Edmund Y. Lam  »View Author Affiliations


Applied Optics, Vol. 51, Issue 1, pp. 33-42 (2012)
http://dx.doi.org/10.1364/AO.51.000033


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Abstract

In many industrial inspection systems, it is required to have a high-precision three-dimensional measurement of an object under test. A popular technique is phase-measuring profilometry. In this paper, we develop some phase-shifting algorithms (PSAs). We propose a novel smoothness constraint in a regularization framework; we call this the R-PSA method and show how to obtain the desired phase measure with an iterative procedure. Both the simulation and experimental results verify the efficacy of our algorithm compared with current multiframe PSAs for interferometric measurements.

© 2012 Optical Society of America

OCIS Codes
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(150.3040) Machine vision : Industrial inspection

ToC Category:
Imaging Systems

History
Original Manuscript: June 27, 2011
Revised Manuscript: August 25, 2011
Manuscript Accepted: August 26, 2011
Published: December 22, 2011

Citation
Fuqin Deng, Wui Fung Sze, Jiangwen Deng, Kenneth S. M. Fung, W. H. Leung, and Edmund Y. Lam, "Regularized multiframe phase-shifting algorithm for three-dimensional profilometry," Appl. Opt. 51, 33-42 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-1-33


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References

  1. A. N. Ng, E. Y. Lam, R. Chung, K. S. Fung, and W. Leung, “Reference-free machine vision inspection of semiconductor die images,” Int. J. Image Graphics 9, 133–152 (2009). [CrossRef]
  2. G. Zeng, Y. Matsushita, L. Quan, and H.-Y. Shum, “Interactive shape from shading,” in IEEE Computer Society Conference on Computer Vision and Pattern Recognition (IEEE, 2005), pp. 343–350.
  3. M. Ishihara and H. Sasaki, “High-speed 3D shape measurement using a nonscanning multiple-beam confocal imaging system,” Proc. SPIE 3478, 68–75 (1998). [CrossRef]
  4. D. Scharstein and R. Szeliski, “A taxonomy and evaluation of dense two-frame stereo correspondence algorithms,” Int. J. Comput. Vis. 47, 7–42 (2002). [CrossRef]
  5. D. Caspi, N. Kiryati, and J. Shamir, “Range imaging with adaptive color structured light,” IEEE Trans. Pattern Anal. Mach. Intell. 20, 470–480 (1998). [CrossRef]
  6. X. Su and W. Chen, “Fourier transform profilometry: a review,” Opt. Lasers Eng. 35, 263–284 (2001). [CrossRef]
  7. V. Srinivasan, H. Liu, and M. Halioua, “Automated phase-measuring profilometry: a phase mapping approach,” Appl. Opt. 24, 185–188 (1985). [CrossRef]
  8. J. Cheng, R. Chung, E. Y. Lam, and K. S. Fung, “Bit-pairing codification for binary pattern projection system,” in International Conference on Pattern Recognition (IEEE, 2006), Vol. 2, pp. 263–266.
  9. J. Cheng, R. Chung, E. Y. Lam, K. S. Fung, and Y. Xu, “Optimization of bit-pairing codification with learning for 3D reconstruction,” Int. J. Image Graphics 7, 445–462(2007). [CrossRef]
  10. J. Salvi, J. Pagés, and J. Batlle, “Pattern codification strategies in structured light systems,” Pattern Recogn. 37, 827–849 (2004). [CrossRef]
  11. M. Dong, R. Chung, E. Y. Lam, and K. S. Fung, “Height inspection of wafer bumps without explicit 3D reconstruction,” IEEE Trans. Electron. Packag. Manuf. 33, 112–121 (2010). [CrossRef]
  12. J. Cheng, R. Chung, E. Y. Lam, K. S. Fung, F. Wang, and W. Leung, “Structure-light based sensing using a single fixed fringe grating: fringe boundary detection and 3D reconstruction,” IEEE Trans. Electron. Packag. Manuf. 31, 19–31(2008). [CrossRef]
  13. V. Srinivasan, H. Liu, and M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23, 3105–3108 (1984). [CrossRef]
  14. C. Ai and J. C. Wyant, “Effect of spurious reflection on phase shift interferometry,” Appl. Opt. 27, 3039–3045(1988). [CrossRef]
  15. C. P. Brophy, “Effect of intensity error correlation on the computed phase of phase-shifting interferometry,” J. Opt. Soc. Am. A 7, 537–541 (1990). [CrossRef]
  16. P. J. de Groot, “Vibration in phase-shifting interferometry,” J. Opt. Soc. Am. A 12, 354–365 (1995). [CrossRef]
  17. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987). [CrossRef]
  18. Y. Shu, R. Chung, Z. Tan, J. Cheng, E. Y. Lam, K. S. Fung, and F. Wang, “Projection optics design for tilted projection of fringe pattern,” Opt. Eng. 47, 053002 (2008). [CrossRef]
  19. S. Boyd and L. Vandenberghe, Convex Optimization(Cambridge University, 2004).
  20. C. C. Paige and M. A. Saunders, “LSQR: an algorithm for sparse linear equations and sparse least squares,” ACM Trans. Math. Softw. 8, 43–71 (1982). [CrossRef]
  21. Å. Björck, Numerical Methods for Least Squares Problems(Society for Industrial and Applied Mathematics, 1996).
  22. A. Blake and A. Zisserman, Visual Reconstruction (MIT, 1987).

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