## Regularized multiframe phase-shifting algorithm for three-dimensional profilometry |

Applied Optics, Vol. 51, Issue 1, pp. 33-42 (2012)

http://dx.doi.org/10.1364/AO.51.000033

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### Abstract

In many industrial inspection systems, it is required to have a high-precision three-dimensional measurement of an object under test. A popular technique is phase-measuring profilometry. In this paper, we develop some phase-shifting algorithms (PSAs). We propose a novel smoothness constraint in a regularization framework; we call this the R-PSA method and show how to obtain the desired phase measure with an iterative procedure. Both the simulation and experimental results verify the efficacy of our algorithm compared with current multiframe PSAs for interferometric measurements.

© 2012 Optical Society of America

**OCIS Codes**

(110.6880) Imaging systems : Three-dimensional image acquisition

(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

(150.3040) Machine vision : Industrial inspection

**ToC Category:**

Imaging Systems

**History**

Original Manuscript: June 27, 2011

Revised Manuscript: August 25, 2011

Manuscript Accepted: August 26, 2011

Published: December 22, 2011

**Citation**

Fuqin Deng, Wui Fung Sze, Jiangwen Deng, Kenneth S. M. Fung, W. H. Leung, and Edmund Y. Lam, "Regularized multiframe phase-shifting algorithm for three-dimensional profilometry," Appl. Opt. **51**, 33-42 (2012)

http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-1-33

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