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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 1 — Jan. 1, 2012
  • pp: 8–14

Antireflective subwavelength structures on microlens arrays—comparison of various manufacturing techniques

Claudia Pacholski, Christoph Morhard, Joachim P. Spatz, Dennis Lehr, Marcel Schulze, Ernst-Bernhard Kley, Andreas Tünnermann, Michael Helgert, Michael Sundermann, and Robert Brunner  »View Author Affiliations

Applied Optics, Vol. 51, Issue 1, pp. 8-14 (2012)

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Antireflective subwavelength structures (ARS) resembling nanostructures found on the cornea of night-active insects reduce the reflection of light by providing a gradual change in the refractive index at the interface. These artificial ARS have mainly been fabricated by a combination of conventional lithography and reactive ion etching, which constrains their application to planar substrates. We report on the fabrication of ARS using three different techniques including bottom-up and top-down methods as well as their combination on microlens arrays (MLAs) made of fused silica. The optical performance of the resulting ARS on the MLAs is as good as ARS fabricated on planar substrates with increased transmission of up to 96% at certain wavelengths.

© 2012 Optical Society of America

OCIS Codes
(080.3630) Geometric optics : Lenses
(220.3740) Optical design and fabrication : Lithography
(240.6700) Optics at surfaces : Surfaces
(310.1210) Thin films : Antireflection coatings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Thin Films

Original Manuscript: August 11, 2011
Revised Manuscript: October 16, 2011
Manuscript Accepted: October 31, 2011
Published: December 22, 2011

Claudia Pacholski, Christoph Morhard, Joachim P. Spatz, Dennis Lehr, Marcel Schulze, Ernst-Bernhard Kley, Andreas Tünnermann, Michael Helgert, Michael Sundermann, and Robert Brunner, "Antireflective subwavelength structures on microlens arrays—comparison of various manufacturing techniques," Appl. Opt. 51, 8-14 (2012)

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