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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 51, Iss. 12 — Apr. 20, 2012
  • pp: 1922–1928

Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique

Young-Sik Ghim and Angela Davies  »View Author Affiliations


Applied Optics, Vol. 51, Issue 12, pp. 1922-1928 (2012)
http://dx.doi.org/10.1364/AO.51.001922


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Abstract

White-light interferometry uses a white-light source with a short coherent length that provides a narrowly localized interferogram that is used to measure three-dimensional surface profiles with possible large step heights without 2π-ambiguity. Combining coherence and phase information improves the vertical resolution. But, inconsistencies between phase and coherence occur at highly curved surfaces such as spherical and tilted surfaces, and these inconsistencies often cause what are termed ghost steps in the measurement result. In this paper, we describe a modified version of white-light interferometry for eliminating these ghost steps and improving the accuracy of white-light interferometry. Our proposed technique is verified by measuring several test samples.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: December 13, 2011
Revised Manuscript: February 8, 2012
Manuscript Accepted: February 26, 2012
Published: April 11, 2012

Citation
Young-Sik Ghim and Angela Davies, "Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique," Appl. Opt. 51, 1922-1928 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-12-1922

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