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Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement |
Applied Optics, Vol. 51, Issue 12, pp. 1939-1944 (2012)
http://dx.doi.org/10.1364/AO.51.001939
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Abstract
In sinusoidal phase-modulating laser diode interferometers, an injection current of a laser diode is sinusoidally modulated to scan the laser wavelength. However, the modulation of the injection current also involves an intensity modulation of the light, which increases the measurement error if a conventional signal processing is used. A novel signal processing for displacement measurement is proposed to eliminate the influence of the intensity modulation. Numerical simulation results and experimental results make it clear that an optimal depth of the sinusoidal phase modulation exists that can reduce the measurement error to a few nanometers.
© 2012 Optical Society of America
OCIS Codes
(070.6020) Fourier optics and signal processing : Continuous optical signal processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(350.2460) Other areas of optics : Filters, interference
ToC Category:
Fourier Optics and Signal Processing
History
Original Manuscript: November 28, 2011
Manuscript Accepted: December 19, 2011
Published: April 11, 2012
Citation
Bofan Wang, Xiangzhao Wang, Osami Sasaki, and Zhongliang Li, "Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement," Appl. Opt. 51, 1939-1944 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-12-1939
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