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Fabrication and properties of ITO films treated by excited atomic oxygen |
Applied Optics, Vol. 51, Issue 12, pp. 1997-2003 (2012)
http://dx.doi.org/10.1364/AO.51.001997
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Abstract
We consider the crystallization of ITO films induced by excited atomic oxygen. Owing to it, transmittance of these films in visible ranges increased by
© 2012 Optical Society of America
OCIS Codes
(290.5880) Scattering : Scattering, rough surfaces
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties
(310.7005) Thin films : Transparent conductive coatings
ToC Category:
Materials
History
Original Manuscript: September 15, 2011
Revised Manuscript: December 6, 2011
Manuscript Accepted: December 12, 2011
Published: April 12, 2012
Citation
Valeriy A. Sterligov, Evgeny V. Shun’ko, Iaroslav O. Grytsaienko, and Leonid V. Poperenko, "Fabrication and properties of ITO films treated by excited atomic oxygen," Appl. Opt. 51, 1997-2003 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-12-1997
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