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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 13 — May. 1, 2012
  • pp: 2351–2360

Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50–200 eV range

Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano, and Kazuo Sano  »View Author Affiliations


Applied Optics, Vol. 51, Issue 13, pp. 2351-2360 (2012)
http://dx.doi.org/10.1364/AO.51.002351


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Abstract

Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00° incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50–200 eV range with the maxima of 22% (or 26%–27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (55eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.

© 2012 Optical Society of America

OCIS Codes
(230.1950) Optical devices : Diffraction gratings
(300.6560) Spectroscopy : Spectroscopy, x-ray
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Optical Devices

History
Original Manuscript: September 1, 2011
Revised Manuscript: October 27, 2011
Manuscript Accepted: October 31, 2011
Published: April 26, 2012

Citation
Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano, and Kazuo Sano, "Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50–200 eV range," Appl. Opt. 51, 2351-2360 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-13-2351


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