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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 13 — May. 1, 2012
  • pp: 2379–2387

Axial nanodisplacement measurement based on astigmatism effect of crossed cylindrical lenses

Long Li, Cuifang Kuang, Ding Luo, and Xu Liu  »View Author Affiliations


Applied Optics, Vol. 51, Issue 13, pp. 2379-2387 (2012)
http://dx.doi.org/10.1364/AO.51.002379


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Abstract

Spot distortion caused by astigmatism effect in orthogonal cylindrical lenses is utilized to measure axial displacement with 30 nm resolution, strong noise immunity, and compact experiment setup. Axial displacement of the sample surface is determined by four-quadrant difference processing of distorted laser spots’ energy distribution images received by CCD. Four-quadrant difference processing results indicate an applicable measuring range of 5.6 μm (cubic fitting r=0.9988) with a highly linear range of 1.2 μm (linear fitting r=0.9996). Factors affecting measuring range and sensitivity are analyzed by theoretical deduction and numerical simulation. This technique has potential applications in drifting sample tracking and measurement in advanced microscopy.

© 2012 Optical Society of America

OCIS Codes
(080.0080) Geometric optics : Geometric optics
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(220.4830) Optical design and fabrication : Systems design

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 5, 2012
Manuscript Accepted: February 20, 2012
Published: April 26, 2012

Citation
Long Li, Cuifang Kuang, Ding Luo, and Xu Liu, "Axial nanodisplacement measurement based on astigmatism effect of crossed cylindrical lenses," Appl. Opt. 51, 2379-2387 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-13-2379

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