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Interferometric spatial coherence tomography: focusing fringe contrast to planes of interest using a quasi-monochromatic structured light source |
Applied Optics, Vol. 51, Issue 15, pp. 3059-3070 (2012)
http://dx.doi.org/10.1364/AO.51.003059
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Abstract
Interferograms of plane parallel optical flats are hard to interpret when acquired with coherent illumination because of the complex fringe pattern resulting from the superposition of three main contributions, namely from the reference surface and the front and back sample surfaces. We illuminate the sample by a field of high temporal and specially tailored partial spatial coherence. This limits the fringe contrast to sheets of adjustable position and thickness along the axis of the interferometer. We outline the technique and demonstrate its application together with phase shifting interferometry to extract the topography of front and back surfaces of transparent samples.
© 2012 Optical Society of America
OCIS Codes
(030.0030) Coherence and statistical optics : Coherence and statistical optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Coherence and Statistical Optics
History
Original Manuscript: January 3, 2012
Revised Manuscript: March 12, 2012
Manuscript Accepted: March 23, 2012
Published: May 18, 2012
Citation
Joachim Heil, Hans-Martin Heuck, Willi Müller, Matthias Netsch, and Joachim Wesner, "Interferometric spatial coherence tomography: focusing fringe contrast to planes of interest using a quasi-monochromatic structured light source," Appl. Opt. 51, 3059-3070 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-15-3059
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