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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 16 — Jun. 1, 2012
  • pp: 3329–3337

Gradual tilting exposure photo and nano lithography technique

Z. Kolahdouz, J. Koohsorkhi, M. A. Cheraghi, M. Saviz, and S. Mohajerzadeh  »View Author Affiliations


Applied Optics, Vol. 51, Issue 16, pp. 3329-3337 (2012)
http://dx.doi.org/10.1364/AO.51.003329


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Abstract

We report a novel tilting exposure photolithography (TEL) technique where gradual pattern displacement is employed to achieve high-resolution features over large areas with reasonable exposure times. A linear array with features of the order of 100 nm has been realized using this technique with standard blue-light LED sources. TEL can be useful in the visible and ultraviolet spectra to create two-dimensional periodic structures. The created structures include the nanometric array of spots and lines. The proposed technique can be used as a writing method where complex features can be generated by moving the sample-holding leading to serpentine nanometric linear arrays.

© 2012 Optical Society of America

OCIS Codes
(110.3960) Imaging systems : Microlithography
(110.5220) Imaging systems : Photolithography
(220.3740) Optical design and fabrication : Lithography
(220.4830) Optical design and fabrication : Systems design
(110.4235) Imaging systems : Nanolithography

ToC Category:
Imaging Systems

History
Original Manuscript: November 29, 2011
Revised Manuscript: January 4, 2012
Manuscript Accepted: February 1, 2012
Published: May 25, 2012

Citation
Z. Kolahdouz, J. Koohsorkhi, M. A. Cheraghi, M. Saviz, and S. Mohajerzadeh, "Gradual tilting exposure photo and nano lithography technique," Appl. Opt. 51, 3329-3337 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-16-3329

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