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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 17 — Jun. 10, 2012
  • pp: 3763–3767

Aluminum nitride grating couplers

Siddhartha Ghosh, Christopher R. Doerr, and Gianluca Piazza  »View Author Affiliations

Applied Optics, Vol. 51, Issue 17, pp. 3763-3767 (2012)

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Grating couplers in sputtered aluminum nitride, a piezoelectric material with low loss in the C band, are demonstrated. Gratings and a waveguide micromachined on a silicon wafer with 600 nm minimum feature size were defined in a single lithography step without partial etching. Silicon dioxide (SiO2) was used for cladding layers. Peak coupling efficiency of 6.6dB and a 1 dB bandwidth of 60 nm have been measured. This demonstration of wire waveguides and wideband grating couplers in a material that also has piezoelectric and elasto-optic properties will enable new functions for integrated photonics and optomechanics.

© 2012 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.3130) Integrated optics : Integrated optics materials
(160.1050) Materials : Acousto-optical materials

ToC Category:
Integrated Optics

Original Manuscript: February 27, 2012
Revised Manuscript: April 23, 2012
Manuscript Accepted: April 26, 2012
Published: June 4, 2012

Siddhartha Ghosh, Christopher R. Doerr, and Gianluca Piazza, "Aluminum nitride grating couplers," Appl. Opt. 51, 3763-3767 (2012)

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