OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 17 — Jun. 10, 2012
  • pp: 3763–3767

Aluminum nitride grating couplers

Siddhartha Ghosh, Christopher R. Doerr, and Gianluca Piazza  »View Author Affiliations


Applied Optics, Vol. 51, Issue 17, pp. 3763-3767 (2012)
http://dx.doi.org/10.1364/AO.51.003763


View Full Text Article

Enhanced HTML    Acrobat PDF (422 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Grating couplers in sputtered aluminum nitride, a piezoelectric material with low loss in the C band, are demonstrated. Gratings and a waveguide micromachined on a silicon wafer with 600 nm minimum feature size were defined in a single lithography step without partial etching. Silicon dioxide (SiO2) was used for cladding layers. Peak coupling efficiency of 6.6dB and a 1 dB bandwidth of 60 nm have been measured. This demonstration of wire waveguides and wideband grating couplers in a material that also has piezoelectric and elasto-optic properties will enable new functions for integrated photonics and optomechanics.

© 2012 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.3130) Integrated optics : Integrated optics materials
(160.1050) Materials : Acousto-optical materials

ToC Category:
Integrated Optics

History
Original Manuscript: February 27, 2012
Revised Manuscript: April 23, 2012
Manuscript Accepted: April 26, 2012
Published: June 4, 2012

Citation
Siddhartha Ghosh, Christopher R. Doerr, and Gianluca Piazza, "Aluminum nitride grating couplers," Appl. Opt. 51, 3763-3767 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-17-3763


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. G. Piazza, P. J. Stephanou, and A. P. Pisano, “Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators,” J. Microelectromech. Syst. 15, 1406–1418 (2006). [CrossRef]
  2. C. Zuniga, M. Rinaldi, S. M. Khamis, T. S. Jones, A. T. Johnson, and G. Piazza, “Nano-enabled microelectromechanical sensor for volatile organic chemical detection,” Appl. Phys. Lett. 94, 223122 (2009). [CrossRef]
  3. Y. Taniyasu, M. Kasu, and T. Makimoto, “An aluminium nitride light-emitting diode with a wavelength of 210 nanometres,” Nature 441, 325–328 (2006). [CrossRef]
  4. S. Yu. Davydov, “Evaluation of physical parameters for the group III nitrates: BN, AlN, GaN, and InN,” Semiconductors 36, 41–44 (2002). [CrossRef]
  5. E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17, 14543–14551 (2009). [CrossRef]
  6. W. Werdecker and F. Aldinger, “Aluminum nitride—an alternative ceramic substrate for high power applications in microcircuits,” IEEE Trans. Comp. Hybrids Manufact. Technol. CHMT-7, 399–404 (1984). [CrossRef]
  7. T. Tamir and S. T. Peng, “Analysis and design of grating couplers,” Appl. Phys. 14, 235–254 (1977). [CrossRef]
  8. D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071–6077 (2006). [CrossRef]
  9. T. Barwicz, M. A. Popovic, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, “Microring-resonator-based add-drop filters in SiN: fabrication and analysis,” Opt. Express 12, 1437–1442 (2004). [CrossRef]
  10. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003). [CrossRef]
  11. X. Tang, Y. Yuan, K. Wongchotigul, and M. G. Spencer, “Dispersion properties of aluminum nitride as measured by an optical waveguide technique,” Appl. Phys. Lett. 70, 3206–3208 (1997). [CrossRef]
  12. G. T. Kiehne, G. K. L. Wong, and J. B. Ketterson, “Optical second-harmonic generation in sputter-deposited AlN films,” J. Appl. Phys. 84, 5922–5927 (1998). [CrossRef]
  13. W. H. P. Pernice, C. Xiong, C. Schuck, and H. X. Tang, “High Q aluminum nitride photonic crystal nanobeam cavities,” Appl. Phys. Lett. 100, 091105 (2012). [CrossRef]
  14. C. R. Doerr, L. Chen, Y.-K. Chen, and L. L. Buhl, “Wide bandwidth silicon nitride grating coupler,” IEEE Photon. Technol. Lett. 22, 1461–1463 (2010). [CrossRef]
  15. F. A. Jenkins and H. E. White, Fundamentals of Optics (McGraw-Hill, 1976).
  16. N. Sinha, G. Wabiszewski, R. Mahameed, V. V. Felmetsger, S. M. Tanner, R. W. Carpick, and G. Piazza, “Piezoelectric aluminum nitride nanoelectromechanical actuators,” Appl. Phys. Lett. 95, 053106 (2009). [CrossRef]
  17. S. Mishin, D. R. Marx, B. Sylvia, V. Lughi, K. L. Turner, and D. R. Clarke, “Sputtered AlN thin films on Si and electrodes for MEMS resonators: relationship between surface quality microstructure and film properties,” in Proceedings of IEEE Ultrasonics Symposium (IEEE, 2003), pp. 2028–2032.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited