OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 17 — Jun. 10, 2012
  • pp: 3763–3767

Aluminum nitride grating couplers

Siddhartha Ghosh, Christopher R. Doerr, and Gianluca Piazza  »View Author Affiliations


Applied Optics, Vol. 51, Issue 17, pp. 3763-3767 (2012)
http://dx.doi.org/10.1364/AO.51.003763


View Full Text Article

Enhanced HTML    Acrobat PDF (422 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Grating couplers in sputtered aluminum nitride, a piezoelectric material with low loss in the C band, are demonstrated. Gratings and a waveguide micromachined on a silicon wafer with 600 nm minimum feature size were defined in a single lithography step without partial etching. Silicon dioxide (SiO2) was used for cladding layers. Peak coupling efficiency of 6.6dB and a 1 dB bandwidth of 60 nm have been measured. This demonstration of wire waveguides and wideband grating couplers in a material that also has piezoelectric and elasto-optic properties will enable new functions for integrated photonics and optomechanics.

© 2012 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.3130) Integrated optics : Integrated optics materials
(160.1050) Materials : Acousto-optical materials

ToC Category:
Integrated Optics

History
Original Manuscript: February 27, 2012
Revised Manuscript: April 23, 2012
Manuscript Accepted: April 26, 2012
Published: June 4, 2012

Citation
Siddhartha Ghosh, Christopher R. Doerr, and Gianluca Piazza, "Aluminum nitride grating couplers," Appl. Opt. 51, 3763-3767 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-17-3763

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited