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Linear variable optical filter-based ultraviolet microspectrometer |
Applied Optics, Vol. 51, Issue 19, pp. 4308-4315 (2012)
http://dx.doi.org/10.1364/AO.51.004308
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Abstract
An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
© 2012 Optical Society of America
OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(300.6190) Spectroscopy : Spectrometers
(300.6540) Spectroscopy : Spectroscopy, ultraviolet
(310.4165) Thin films : Multilayer design
ToC Category:
Spectroscopy
History
Original Manuscript: December 13, 2011
Revised Manuscript: May 7, 2012
Manuscript Accepted: May 17, 2012
Published: June 22, 2012
Citation
Arvin Emadi, Huaiwen Wu, Ger de Graaf, Peter Enoksson, Jose Higino Correia, and Reinoud Wolffenbuttel, "Linear variable optical filter-based ultraviolet microspectrometer," Appl. Opt. 51, 4308-4315 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-19-4308
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