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Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry |
Applied Optics, Vol. 51, Issue 20, pp. 4891-4895 (2012)
http://dx.doi.org/10.1364/AO.51.004891
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Abstract
The purposes of the paper are threefold: (1) to show the possibility to perform parallel phase-shifting Fizeau interferometry by using a quarter waveplate with high flatness as a reference, (2) to present a comparative study between the phase-shifting algorithm and the off-axis geometry in surface microtopography measurement, and (3) to show the advantages of using the proposed common path Fizeau interferometry over the quasi-common path Michelson interferometry in terms of accuracy in measurement. The compelling advantage of the proposed parallel phase-shifting Fizeau interferometric technique is the long-term stability that leads to measuring objects with a high degree of accuracy.
© 2012 Optical Society of America
OCIS Codes
(070.6110) Fourier optics and signal processing : Spatial filtering
(100.5090) Image processing : Phase-only filters
(170.0180) Medical optics and biotechnology : Microscopy
(180.0180) Microscopy : Microscopy
ToC Category:
Image Processing
History
Original Manuscript: March 20, 2012
Revised Manuscript: May 11, 2012
Manuscript Accepted: May 18, 2012
Published: July 9, 2012
Virtual Issues
Vol. 7, Iss. 9 Virtual Journal for Biomedical Optics
Citation
D. G. Abdelsalam, Baoli Yao, Peng Gao, Junwei Min, and Rongli Guo, "Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry," Appl. Opt. 51, 4891-4895 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-20-4891
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