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Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry |
Applied Optics, Vol. 51, Issue 21, pp. 4971-4975 (2012)
http://dx.doi.org/10.1364/AO.51.004971
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Abstract
By analyzing the spectral domain’s phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry–Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper.
© 2012 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: February 10, 2012
Revised Manuscript: June 7, 2012
Manuscript Accepted: June 14, 2012
Published: July 11, 2012
Citation
Pei Zhu and Kaiwei Wang, "Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry," Appl. Opt. 51, 4971-4975 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-21-4971
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