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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 21 — Jul. 20, 2012
  • pp: 4971–4975

Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry

Pei Zhu and Kaiwei Wang  »View Author Affiliations


Applied Optics, Vol. 51, Issue 21, pp. 4971-4975 (2012)
http://dx.doi.org/10.1364/AO.51.004971


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Abstract

By analyzing the spectral domain’s phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry–Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 10, 2012
Revised Manuscript: June 7, 2012
Manuscript Accepted: June 14, 2012
Published: July 11, 2012

Citation
Pei Zhu and Kaiwei Wang, "Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry," Appl. Opt. 51, 4971-4975 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-21-4971


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References

  1. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784–3788 (1990). [CrossRef]
  2. L. Deck and P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef]
  3. T. Dresel, G. Häusler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef]
  4. P. J. Caber, “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438–3441 (1993). [CrossRef]
  5. A. Harasaki and J. C. Wyant, “Fringe modulation skewing effect in white-light vertical scanning interferometry,” Appl. Opt. 39, 2101–2106 (2000). [CrossRef]
  6. A. Pfortner and J. Schwider, “Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures,” Appl. Opt. 40, 6223–6228 (2001). [CrossRef]
  7. P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002). [CrossRef]
  8. C. Sainz, J. Calatroni, and G. Tribillon, “Refractometry of liquid samples with spectrally resolved white light interferometry,” Meas. Sci. Technol. 1, 356–361 (1990). [CrossRef]
  9. P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996). [CrossRef]
  10. U. Schnell and R. Dandliker, “Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target,” Opt. Lett. 21, 528–530 (1996). [CrossRef]
  11. K.-N. Joo and S.-W. Kim, “Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser,” Opt. Express 14, 5954–5960 (2006). [CrossRef]
  12. D. X. Hammer and A. J. Welch, “Spectrally resolved white-light interferometry for measurement of ocular dispersion,” J. Opt. Soc. Am. A 16, 2092–2102 (1999). [CrossRef]
  13. S. K. Debnath and M. P. Kothiyal, “Spectrally resolved white–light phase–shifting interference microscopy for thickness–profile measurements of transparent thin film layers on patterned substrates,” Opt. Express 4662, 8636–8640 (2006). [CrossRef]
  14. K. Okada and J. Tsujiuchi, “Wavelength scanning interferometry for the measurement of both surface shapes and refractive index inhomogeneity,” Proc. SPIE 1162, 395–401 (1989). [CrossRef]
  15. K. Okada, H. Sakuta, T. Ose, and J. Tsujiuchi, “Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry,” Appl. Opt. 29, 3280–3285 (1990). [CrossRef]
  16. D. R. Herriott, “Multiple-wavelength multiple-beam interferometric observation of flat surfaces,” J. Opt. Soc. Am. 51, 1142–1145 (1961). [CrossRef]
  17. J. Schwider, “Multiple beam Fizeau interferometer with frequency comb illumination,” Opt. Commun. 282, 3308–3324(2009). [CrossRef]
  18. P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms.” J. Mod. Opt. 43, 701–708 (1996). [CrossRef]
  19. J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally-resolved white-light interferometry as a profilometry tool,” Opt Laser Technol. 28, 485–489 (1996). [CrossRef]
  20. H. S. Suja, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–36 (2001). [CrossRef]
  21. S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005). [CrossRef]
  22. S. K. Debnath and M. P. Kothiyal, “Improved optical profiling using spectral phase in spectrally resolved white light interferometry,” Appl. Opt. 45, 6965–6972 (2006). [CrossRef]
  23. S. K. Debnath and M. P. Kothiyal, “Analysis of spectrally resolved white light interferometry by Hilbert transform method,” Proc. SPIE 6292, 62920P (2006). [CrossRef]
  24. J. Schwider and L. Zhou, “Dispersive interferometric profilometer,” Opt. Lett. 19, 995–997 (1994). [CrossRef]
  25. A. Harasaki, J. Schmidt, and J. C. Wyant, “Improved vertical-scanning interferometry,” Appl. Opt. 39, 2107–2115 (2000). [CrossRef]

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