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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 21 — Jul. 20, 2012
  • pp: 5060–5065

Optics InfoBase > Applied Optics > Volume 51 > Issue 21 > Page 5060

White-light ellipsometer with geometric phase shifter

Lionel R. Watkins and Maxime Derbois  »View Author Affiliations


Applied Optics, Vol. 51, Issue 21, pp. 5060-5065 (2012)
http://dx.doi.org/10.1364/AO.51.005060


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Abstract

We describe a simple spectroscopic ellipsometer that uses a geometric phase shifter and a white-light source to generate a small number of phase-stepped intensities I(λ), which are recorded by a spectrometer. The ellipsometric angles ψ and Δ are easily calculated from these intensities at each wavelength simultaneously. We show that errors in Δ due to the nonideal behavior of the achromatic quarter-wave plate in the phase shifter can be made small by suitably adjusting the azimuth of the linearly polarized light incident on the sample. Two silicon dioxide films were measured with this instrument between 450 and 850 nm and yielded best fit film thicknesses of 1000.6±0.1  Å and 20.6±0.1  Å, in excellent agreement with those obtained using a commercial ellipsometer.

© 2012 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(240.0310) Optics at surfaces : Thin films
(260.5430) Physical optics : Polarization

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 6, 2012
Revised Manuscript: May 28, 2012
Manuscript Accepted: June 3, 2012
Published: July 12, 2012

Citation
Lionel R. Watkins and Maxime Derbois, "White-light ellipsometer with geometric phase shifter," Appl. Opt. 51, 5060-5065 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-21-5060

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