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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 21 — Jul. 20, 2012
  • pp: 5066–5072

Nanometer displacement measurement using Fresnel diffraction

Ali Akbar Khorshad, Khosrow Hassani, and Mohammad Taghi Tavassoly  »View Author Affiliations

Applied Optics, Vol. 51, Issue 21, pp. 5066-5072 (2012)

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We introduce a relatively simple and efficient optical technique to measure nanoscale displacement based on visibility variations of the Fresnel diffraction fringes from a two-dimensional phase step. In this paper we use our technique to measure electromechanical expansions by a thin piezoelectric ceramic and also thermal changes in the diameter of a tungsten wire. Early results provide convincing evidence that sensitivity up to a few nanometers can be achieved, and our technique has the potential to be used as a nanodisplacement probe.

© 2012 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Diffraction and Gratings

Original Manuscript: January 17, 2012
Revised Manuscript: May 9, 2012
Manuscript Accepted: June 5, 2012
Published: July 12, 2012

Ali Akbar Khorshad, Khosrow Hassani, and Mohammad Taghi Tavassoly, "Nanometer displacement measurement using Fresnel diffraction," Appl. Opt. 51, 5066-5072 (2012)

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