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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 21 — Jul. 20, 2012
  • pp: 5224–5230

Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator

Tatsutoshi Shioda, Takashi Morisaki, Tuan Quoc Banh, and Kohei Suzuki  »View Author Affiliations


Applied Optics, Vol. 51, Issue 21, pp. 5224-5230 (2012)
http://dx.doi.org/10.1364/AO.51.005224


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Abstract

A virtually imaged phased array (VIPA) installed optical interferometer has been expanded to the two-dimensional (2D) tomography from the previous one-dimensional single-shot imaging technique with keeping the resolution and the measurement range. A single-shot measurement has been realized by a spatial phase modulator installed in the optical interferometer and tracing the delay time to pixel numbers on a 2D charge-coupled device (CCD) image sensor. The flexibility of the sample position was experimentally confirmed to be >25mm, in relation to the VIPA coherency, for which the number of the interference order was confirmed to be 35. As a demonstration, a surface profile of stacked gauge blocks was observed. The repeatability of the surface position was 5 μm for the surface profilometry. In addition, a multilayer structure was observed using a glass plate. The experimental resolution was 53 μm when the amplified spontaneous emission light generated by the optical fiber amplifier was used for the light source. The single-shot measurement was confirmed by the 2D-CCD at a frame rate of 30 frames per second (FPS), and it provided evidence that the 2D scanless profilometry was successfully achieved using the VIPA optical device.

© 2012 Optical Society of America

OCIS Codes
(110.3175) Imaging systems : Interferometric imaging
(110.6955) Imaging systems : Tomographic imaging

ToC Category:
Imaging Systems

History
Original Manuscript: February 21, 2012
Revised Manuscript: May 31, 2012
Manuscript Accepted: June 5, 2012
Published: July 18, 2012

Citation
Tatsutoshi Shioda, Takashi Morisaki, Tuan Quoc Banh, and Kohei Suzuki, "Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator," Appl. Opt. 51, 5224-5230 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-21-5224

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