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Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology |
Applied Optics, Vol. 51, Issue 21, pp. 5283-5294 (2012)
http://dx.doi.org/10.1364/AO.51.005283
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Abstract
A multiple height-transfer interferometric technique was developed to increase the absolute distance measurement capability of a metrology system that uses a tunable laser. Using multiple accurately calibrated reference heights, this technique relaxes the requirement of knowing accurate wavelength information for multiple wavelength interferometry while maintaining its advantages. We present an uncertainty analysis, analyze the primary sources of uncertainties limiting the performance of this technique, and discuss how errors can be minimized. Measurement results of 3D images obtained from a variety of objects are presented. The measurement uncertainty is experimentally demonstrated to be 0.3 μm over 50 mm for two discontinuous surfaces with a confidence level of 95% in a lab environment.
© 2012 Optical Society of America
OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.2880) Instrumentation, measurement, and metrology : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: March 12, 2012
Revised Manuscript: May 9, 2012
Manuscript Accepted: June 4, 2012
Published: July 19, 2012
Citation
Hao Yu, Carl Aleksoff, and Jun Ni, "Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology," Appl. Opt. 51, 5283-5294 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-21-5283
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