OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 23 — Aug. 10, 2012
  • pp: 5657–5663

Analysis of Si+-implanted Nd:YVO4 crystal: the relation between lattice damage and waveguide formation

Yu-Jie Ma, Fei Lu, Xian-Bing Ming, Ming Chen, Xiu-Hong Liu, and Jiao-Jian Yin  »View Author Affiliations


Applied Optics, Vol. 51, Issue 23, pp. 5657-5663 (2012)
http://dx.doi.org/10.1364/AO.51.005657


View Full Text Article

Enhanced HTML    Acrobat PDF (877 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report the lattice damage and annealing properties of the 500 keV Si+ ions implanted Nd:YVO4 crystal with different doses. The Rutherford backscattering spectrometry/channeling technique was used to analyze the damage profiles of ion-implanted samples. A series of post-implant annealing was performed at temperatures from 250 °C to 400 °C to investigate the relation between lattice damage profile and the waveguide formation. Implantations at doses of more than 5×1014ions/cm2 can result in high damage ratio in the near-surface region and the lattice structure cannot be restored even after annealing at 400 °C. Such seriously damaged lattice is relatively stable and contributes to the waveguide structure. Convergence of the refractive index at the surface region after ion implantation is believed mainly due to the elastic collisions with the target atoms caused by nuclear energy loss.

© 2012 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(160.3380) Materials : Laser materials
(230.7390) Optical devices : Waveguides, planar
(310.2790) Thin films : Guided waves

ToC Category:
Thin Films

History
Original Manuscript: May 3, 2012
Revised Manuscript: June 18, 2012
Manuscript Accepted: July 4, 2012
Published: August 2, 2012

Citation
Yu-Jie Ma, Fei Lu, Xian-Bing Ming, Ming Chen, Xiu-Hong Liu, and Jiao-Jian Yin, "Analysis of Si+-implanted Nd:YVO4 crystal: the relation between lattice damage and waveguide formation," Appl. Opt. 51, 5657-5663 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-23-5657

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited