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Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter |
Applied Optics, Vol. 51, Issue 25, pp. 5989-5995 (2012)
http://dx.doi.org/10.1364/AO.51.005989
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Abstract
We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is
© 2012 Optical Society of America
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(230.3990) Optical devices : Micro-optical devices
(320.5540) Ultrafast optics : Pulse shaping
ToC Category:
Optical Devices
History
Original Manuscript: June 26, 2012
Manuscript Accepted: July 16, 2012
Published: August 23, 2012
Citation
Michael Bohling, Thomas Seiler, Boguslaw Wdowiak, Jürgen Jahns, Jürgen Mohr, and Martin Börner, "Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter," Appl. Opt. 51, 5989-5995 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-25-5989
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