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Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry |
Applied Optics, Vol. 51, Issue 27, pp. 6457-6464 (2012)
http://dx.doi.org/10.1364/AO.51.006457
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Abstract
The influence of edge roughness in angle-resolved scatterometry at periodically structured surfaces is investigated. A good description of the radiation interaction with structured surfaces is crucial for the understanding of optical imaging processes such as, e.g., in photolithography. We compared an analytical two-dimensional (2D) model and a numerical three-dimensional simulation with respect to the characterization of 2D diffraction of a line grating involving structure roughness. The results show a remarkably high agreement. The diffraction intensities of a rough structure can therefore be estimated using the numerical simulation result of an undisturbed structure and an analytically derived correction function. This work allows to improve scatterometric results for the case of practically relevant 2D structures.
© 2012 Optical Society of America
OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(290.5820) Scattering : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces
(290.5825) Scattering : Scattering theory
ToC Category:
Scattering
History
Original Manuscript: July 6, 2012
Manuscript Accepted: August 13, 2012
Published: September 11, 2012
Virtual Issues
Vol. 7, Iss. 11 Virtual Journal for Biomedical Optics
Citation
Akiko Kato, Sven Burger, and Frank Scholze, "Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry," Appl. Opt. 51, 6457-6464 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-27-6457
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