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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 27 — Sep. 20, 2012
  • pp: 6606–6611

Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks

Jianming Zhang, Chuanfei Guo, Yongsheng Wang, Junjie Miao, Ye Tian, and Qian Liu  »View Author Affiliations


Applied Optics, Vol. 51, Issue 27, pp. 6606-6611 (2012)
http://dx.doi.org/10.1364/AO.51.006606


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Abstract

One-step gray-tone lithography is the most effective approach to making three-dimensional (3D) micro-optical elements (MOEs). Metal-transparent-metallic-oxide (MTMO) grayscale masks are novel and quite cost effective. In this paper, through the successful fabrication of 3D SiO2 MOEs by gray-tone lithography and reactive ion etching, we thoroughly investigate the practical technique needs of MTMO grayscale masks on metallic nanofilms. Design calibration, pattern transfer, resolution, lifetime, and mask protection of grayscale masks have been verified. This work shows that the MTMO grayscale photomask has good practical applicability in the laboratory and in industry.

© 2012 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(160.4236) Materials : Nanomaterials
(310.6845) Thin films : Thin film devices and applications
(110.6895) Imaging systems : Three-dimensional lithography

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: June 20, 2012
Revised Manuscript: July 27, 2012
Manuscript Accepted: August 25, 2012
Published: September 18, 2012

Citation
Jianming Zhang, Chuanfei Guo, Yongsheng Wang, Junjie Miao, Ye Tian, and Qian Liu, "Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks," Appl. Opt. 51, 6606-6611 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-27-6606


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