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Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks |
Applied Optics, Vol. 51, Issue 27, pp. 6606-6611 (2012)
http://dx.doi.org/10.1364/AO.51.006606
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Abstract
One-step gray-tone lithography is the most effective approach to making three-dimensional (3D) micro-optical elements (MOEs). Metal-transparent-metallic-oxide (MTMO) grayscale masks are novel and quite cost effective. In this paper, through the successful fabrication of 3D
© 2012 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(160.4236) Materials : Nanomaterials
(310.6845) Thin films : Thin film devices and applications
(110.6895) Imaging systems : Three-dimensional lithography
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: June 20, 2012
Revised Manuscript: July 27, 2012
Manuscript Accepted: August 25, 2012
Published: September 18, 2012
Citation
Jianming Zhang, Chuanfei Guo, Yongsheng Wang, Junjie Miao, Ye Tian, and Qian Liu, "Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks," Appl. Opt. 51, 6606-6611 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-27-6606
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