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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 28 — Oct. 1, 2012
  • pp: 6700–6707

Multiwavelength-integrated local model fitting method for interferometric surface profiling

Akihiro Yamashita, Masashi Sugiyama, Katsuichi Kitagawa, and Hisashi Kobayashi  »View Author Affiliations


Applied Optics, Vol. 51, Issue 28, pp. 6700-6707 (2012)
http://dx.doi.org/10.1364/AO.51.006700


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Abstract

The local model fitting (LMF) method is a useful single-shot surface profiling algorithm that features fast measurement speed and robustness against vibration. However, the measurement range of the LMF method (i.e., measurable height difference between two neighboring pixels) is limited up to a quarter of the light source wavelength. To cope with this problem, the multiwavelength-matched LMF (MM-LMF) method was proposed, where the plain LMF method is first applied individually to interference images obtained from multiple light sources with different wavelengths, and then the LMF solutions are matched to obtain a range-extended solution. Although the MM-LMF method was shown to provide high measurement accuracy under moderate noise, phase unwrapping errors can occur if individual LMF solutions are erroneous. In this paper, we propose the multiwavelength-integrated LMF (MI-LMF) method, which directly computes a range-extended solution from multiple interference images in an integrated way. The effectiveness of the proposed MI-LMF method is demonstrated through simulations and actual experiments.

© 2012 Optical Society of America

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.6700) Optics at surfaces : Surfaces

ToC Category:
Optics at Surfaces

History
Original Manuscript: March 6, 2012
Revised Manuscript: June 12, 2012
Manuscript Accepted: August 28, 2012
Published: September 24, 2012

Citation
Akihiro Yamashita, Masashi Sugiyama, Katsuichi Kitagawa, and Hisashi Kobayashi, "Multiwavelength-integrated local model fitting method for interferometric surface profiling," Appl. Opt. 51, 6700-6707 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-28-6700


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References

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  12. In this paper, we use the following method: we first apply the plain LMF method to each interference image and obtain estimates of the bias aj(x,y) and amplitude bj(x,y). Then we apply a 7×7 pixel median filter to the entire images of aj(x,y) and bj(x,y) and use the obtained values as a^j(x,y) and b^j(x,y).
  13. See http://www.scn.tv/user/torayins/ for details.
  14. In this experiment, we were interested in the sharpness of the steps along the x axis. A practical heuristic for accurate measurement is to introduce a spatial carrier orthogonal to the direction of interest, i.e., along the y axis. Following this heuristic, we decided to use a rectangular-shaped local area along the y axis.

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