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Optical accelerometer based on grating interferometer with phase modulation technique |
Applied Optics, Vol. 51, Issue 29, pp. 7005-7010 (2012)
http://dx.doi.org/10.1364/AO.51.007005
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Abstract
In this paper, an optical accelerometer based on grating interferometer with
phase modulation technique is proposed. This device architecture consists of a
laser diode, a sensing chip and an optoelectronic processing circuit. The
sensing chip is a sandwich structure, which is composed of a grating, a
piezoelectric translator and a micromachined silicon structure consisting of a
proof mass and four cantilevers. The detected signal is intensity-modulated with
phase modulation technique and processed with a lock-in amplifier for
demodulation. Experimental results show that this optical accelerometer has
acceleration sensitivity of
© 2012 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(230.1950) Optical devices : Diffraction gratings
(280.4788) Remote sensing and sensors : Optical sensing and sensors
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: April 11, 2012
Revised Manuscript: August 31, 2012
Manuscript Accepted: September 8, 2012
Published: October 5, 2012
Citation
Shuangshuang Zhao, Juan Zhang, Changlun Hou, Jian Bai, and Guoguang Yang, "Optical accelerometer based on grating interferometer with phase modulation technique," Appl. Opt. 51, 7005-7010 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-29-7005
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