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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 29 — Oct. 10, 2012
  • pp: 7005–7010

Optical accelerometer based on grating interferometer with phase modulation technique

Shuangshuang Zhao, Juan Zhang, Changlun Hou, Jian Bai, and Guoguang Yang  »View Author Affiliations

Applied Optics, Vol. 51, Issue 29, pp. 7005-7010 (2012)

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In this paper, an optical accelerometer based on grating interferometer with phase modulation technique is proposed. This device architecture consists of a laser diode, a sensing chip and an optoelectronic processing circuit. The sensing chip is a sandwich structure, which is composed of a grating, a piezoelectric translator and a micromachined silicon structure consisting of a proof mass and four cantilevers. The detected signal is intensity-modulated with phase modulation technique and processed with a lock-in amplifier for demodulation. Experimental results show that this optical accelerometer has acceleration sensitivity of 619 V / g and high-resolution acceleration detection of 3 μg in the linear region.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(230.1950) Optical devices : Diffraction gratings
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 11, 2012
Revised Manuscript: August 31, 2012
Manuscript Accepted: September 8, 2012
Published: October 5, 2012

Shuangshuang Zhao, Juan Zhang, Changlun Hou, Jian Bai, and Guoguang Yang, "Optical accelerometer based on grating interferometer with phase modulation technique," Appl. Opt. 51, 7005-7010 (2012)

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