In this paper, we report the basic theory and method of single exposure interference lithography (IL) to fabricate two-dimensional (2D) superposed microstructures. Distribution of six-beam interference intensities with different azimuth angle is discussed, and 2D superposed microstructures with different periodic constants are obtained by computer simulations. The experiment results using CHP-C positive photoresist show a 2D superposed photonic crystal composed of a periodically repeated hexagonal pattern of hexagonal lattice cells, which is in close agreement with the computer simulation. Fabrication of a superposed structure by single exposure IL paves the way for studying 2D photonic crystal fabrication, surface lasing, optical waveguides, and so on.
© 2012 Optical Society of America
Original Manuscript: July 28, 2011
Revised Manuscript: October 25, 2011
Manuscript Accepted: October 25, 2011
Published: January 16, 2012
Hao Lü, Qiu-Ling Zhao, Qing-Yue Zhang, Dong-Jie Niu, and Xia Wang, "Fabrication of two-dimensional superposed microstructure by interference lithography," Appl. Opt. 51, 302-305 (2012)