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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 3 — Jan. 20, 2012
  • pp: 365–369

Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Shouleh Nikzad, Michael E. Hoenk, Frank Greer, Blake Jacquot, Steve Monacos, Todd J. Jones, Jordana Blacksberg, Erika Hamden, David Schiminovich, Chris Martin, and Patrick Morrissey  »View Author Affiliations

Applied Optics, Vol. 51, Issue 3, pp. 365-369 (2012)

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We have used molecular beam epitaxy (MBE) based delta-doping technology to demonstrate nearly 100% internal quantum efficiency (QE) on silicon electron-multiplied charge-coupled devices (EMCCDs) for single photon counting detection applications. We used atomic layer deposition (ALD) for antireflection (AR) coatings and achieved atomic-scale control over the interfaces and thin film materials parameters. By combining the precision control of MBE and ALD, we have demonstrated more than 50% external QE in the far and near ultraviolet in megapixel arrays. We have demonstrated that other important device performance parameters such as dark current are unchanged after these processes. In this paper, we briefly review ultraviolet detection, report on these results, and briefly discuss the techniques and processes employed.

© 2012 Optical Society of America

OCIS Codes
(040.0040) Detectors : Detectors
(040.6070) Detectors : Solid state detectors
(040.7190) Detectors : Ultraviolet
(160.0160) Materials : Materials
(250.0250) Optoelectronics : Optoelectronics
(310.0310) Thin films : Thin films

ToC Category:

Original Manuscript: July 19, 2011
Manuscript Accepted: September 2, 2011
Published: January 20, 2012

Virtual Issues
Vol. 7, Iss. 3 Virtual Journal for Biomedical Optics

Shouleh Nikzad, Michael E. Hoenk, Frank Greer, Blake Jacquot, Steve Monacos, Todd J. Jones, Jordana Blacksberg, Erika Hamden, David Schiminovich, Chris Martin, and Patrick Morrissey, "Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications," Appl. Opt. 51, 365-369 (2012)

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