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Shape correction of optical surfaces using plasma chemical vaporization machining with a hemispherical tip electrode |
Applied Optics, Vol. 51, Issue 3, pp. 401-407 (2012)
http://dx.doi.org/10.1364/AO.51.000401
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Abstract
We propose a plasma chemical vaporization machining device with a hemispherical tip electrode for optical fabrication. Radio-frequency plasma is generated close to the electrode under atmospheric conditions, and a workpiece is scanned relative to the stationary electrode under three-axis motion control to remove target areas on a workpiece surface. Experimental results demonstrate that surface removal progresses although process gas is not forcibly supplied to the plasma. The correction of shape errors on conventionally polished spheres is performed. As a result, highly accurate smooth surfaces with the desired rms shape accuracy of 3 nm are successfully obtained, which confirms that the device is effective for the fabrication of optics.
© 2012 Optical Society of America
OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(220.1250) Optical design and fabrication : Aspherics
(220.4610) Optical design and fabrication : Optical fabrication
(240.6700) Optics at surfaces : Surfaces
(350.4600) Other areas of optics : Optical engineering
(350.5400) Other areas of optics : Plasmas
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: July 13, 2011
Manuscript Accepted: August 5, 2011
Published: January 20, 2012
Citation
Hideo Takino, Kazuya Yamamura, Yasuhisa Sano, and Yuzo Mori, "Shape correction of optical surfaces using plasma chemical vaporization machining with a hemispherical tip electrode," Appl. Opt. 51, 401-407 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-3-401
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