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Computational manufacturing as a key element in the design–production chain for modern multilayer coatings |
Applied Optics, Vol. 51, Issue 31, pp. 7604-7615 (2012)
http://dx.doi.org/10.1364/AO.51.007604
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Abstract
We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.
© 2012 Optical Society of America
OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.4165) Thin films : Multilayer design
ToC Category:
Thin Films
History
Original Manuscript: July 5, 2012
Revised Manuscript: October 1, 2012
Manuscript Accepted: October 2, 2012
Published: October 26, 2012
Citation
Tatiana V. Amotchkina, Sebastian Schlichting, Henrik Ehlers, Michael K. Trubetskov, Alexander V. Tikhonravov, and Detlev Ristau, "Computational manufacturing as a key element in the design–production chain for modern multilayer coatings," Appl. Opt. 51, 7604-7615 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-31-7604
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