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Design and experimental investigation of highly efficient resonance-domain diffraction gratings in the visible spectral region |
Applied Optics, Vol. 51, Issue 34, pp. 8074-8080 (2012)
http://dx.doi.org/10.1364/AO.51.008074
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Abstract
Surface-relief resonance-domain diffraction gratings with deep and dense grooves provide considerable changes in light propagation direction, wavefront curvature, and nearly 100% Bragg diffraction efficiency usually attributed only to volume optical holograms. In this paper, we present design, computer simulation, fabrication, and experimental results of binary resonance-domain diffraction gratings in the visible spectral region. Performance of imperfectly fabricated diffraction groove profiles was optimized by controlling the DC and the depth of the grooves. Indeed, more than 97% absolute Bragg diffraction efficiency was measured at the 635 nm wavelength with binary gratings having periods of 520 nm and groove depths of about 1000 nm, fabricated by direct electron-beam lithography and reactive ion etching.
© 2012 Optical Society of America
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(090.0090) Holography : Holography
(350.3950) Other areas of optics : Micro-optics
ToC Category:
Holography
History
Original Manuscript: August 31, 2012
Manuscript Accepted: October 11, 2012
Published: November 27, 2012
Citation
Omri Barlev, Michael A. Golub, Asher A. Friesem, and Menachem Nathan, "Design and experimental investigation of highly efficient resonance-domain diffraction gratings in the visible spectral region," Appl. Opt. 51, 8074-8080 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-34-8074
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