OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 36 — Dec. 20, 2012
  • pp: 8579–8586

Application of white-light scanning interferometer on transparent thin-film measurement

Meng-Chi Li, Der-Shen Wan, and Cheng-Chung Lee  »View Author Affiliations


Applied Optics, Vol. 51, Issue 36, pp. 8579-8586 (2012)
http://dx.doi.org/10.1364/AO.51.008579


View Full Text Article

Acrobat PDF (892 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A method to measure thin-film thickness, refractive index, and dispersion constants based on white-light interferometry is described. The thin-film property is retrieved from the Fourier amplitude of the white-light correlogram. The sources of errors in Fourier amplitude, which include the accuracy of wave number, light source variation in time, and illumination nonuniformity, are investigated. With all these errors reduced, the film thicknesses and refractive indices of four samples measured by white-light interferometry are within 1% of the ellipsometry results.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(240.0310) Optics at surfaces : Thin films
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 20, 2012
Revised Manuscript: October 15, 2012
Manuscript Accepted: November 14, 2012
Published: December 14, 2012

Citation
Meng-Chi Li, Der-Shen Wan, and Cheng-Chung Lee, "Application of white-light scanning interferometer on transparent thin-film measurement," Appl. Opt. 51, 8579-8586 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-36-8579


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. P. A. Flourney, R. W. McClure, and G. Wyntjes, “White-light interferometric thickness gauge,” Appl. Opt. 11, 1907–1915 (1972). [CrossRef]
  2. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784–3788 (1990). [CrossRef]
  3. T. Dresel, G. Häusler, and H. Venzke, “Three dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef]
  4. L. Deck, and P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef]
  5. G. S. Kino, and S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990). [CrossRef]
  6. A. Pförtner, and J. Schwider, “Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures,” Appl. Opt. 40, 6223–6228 (2001). [CrossRef]
  7. P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002). [CrossRef]
  8. J. C. Wyant, “White light interferometry,” Proc. SPIE 4737, 98–107 (2002). [CrossRef]
  9. T. Li, A. Wang, K. Murphy, and R. Claus, “White-light scanning fiber Michelson interferometer for absolute position-distance measurement,” Opt. Lett. 20, 785–787 (1995). [CrossRef]
  10. P. de Groot, and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  11. A. Olszak, “Lateral scanning white-light interferometer,” Appl. Opt. 39, 3906–3913 (2000). [CrossRef]
  12. S. W. Kim, and G. H. Kim, “Thickness-profile measurement of transparent thin film layers by white-light scanning interferometry,” Appl. Opt. 38, 5968–5973 (1999). [CrossRef]
  13. M. Roy, I. Cooper, P. Moore, C. J. R. Sheppard, and P. Hariharan, “White-light interference microscopy: effects of multiple reflections within a surface film,” Opt. Express 13, 164–170 (2005). [CrossRef]
  14. D. S. Wan, “Measurement of thin films using Fourier amplitude,” US patent 7612891 (3November2009).
  15. F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, “Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry,” J. Res. Natl. Bur. Stan. Sect. A 67, 363–377 (1963). [CrossRef]
  16. R. A. Synowicki, “Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants,” Thin Solid Films 313–314, 394–397 (1998). [CrossRef]
  17. H. A. Macleod, Thin Film Optical Filters (Macmillan, 1986).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited