Wavelength scanning interferometry (WSI) can be used for surface measurement with discontinuous surface profiles by producing phase shifts without any mechanical scanning process. The choice of algorithms for the WSI to analyze the fringe pattern depends on the desired accuracy and computing speed. This paper provides comparison of four different algorithms to analyze the interference fringe pattern acquired from WSI. The mathematical description of these algorithms, their computing resolution, and speed are presented. Two step-height samples are measured using the WSI. Experimental results demonstrate that the accuracy of measuring surface height varies from micrometer to nanometer value depending on the algorithm used to analyze the captured interferograms.
© 2012 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: August 8, 2012
Revised Manuscript: October 6, 2012
Manuscript Accepted: November 28, 2012
Published: December 20, 2012
Hussam Muhamedsalih, Feng Gao, and Xiangqian Jiang, "Comparison study of algorithms and accuracy in the wavelength scanning interferometry," Appl. Opt. 51, 8854-8862 (2012)