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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 8 — Mar. 10, 2012
  • pp: 1037–1044

Spatial mismatch calibration using circular carrier technique in the simultaneous phase shifting interferometry

Bo Li, Lei Chen, Bing Zhao, Mingxiao Yang, and Jinpeng Li  »View Author Affiliations

Applied Optics, Vol. 51, Issue 8, pp. 1037-1044 (2012)

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In most simultaneous phase shifting interferometry (SPSI) systems, a group of phase shifting interferograms are captured simultaneously at the different physical locations to retrieve the phase. The data of different interferograms should be spatially matched correctly, which is hard to realize by existing methods or this spatial mismatch will lead to phase retrieving error. In this paper, a spatial mismatch calibration method is proposed, where the circular carrier is introduced in the interferograms of the SPSI system, and the modulating phases of any two interferograms can be retrieved by the demodulation technique of circular carrier interferogram. The slope of the difference between these two phases is proportional to the mismatch value, so this error can be extracted and the experiment setup calibrated. The main error sources of the proposed method are analyzed with the conclusion that its match precision can be achieved up to 0.5 pixel. In addition, the simulated interferograms and actual interferograms captured in a SPSI system are processed to validate our proposed method.

© 2012 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: September 23, 2011
Revised Manuscript: December 6, 2011
Manuscript Accepted: January 3, 2012
Published: March 5, 2012

Bo Li, Lei Chen, Bing Zhao, Mingxiao Yang, and Jinpeng Li, "Spatial mismatch calibration using circular carrier technique in the simultaneous phase shifting interferometry," Appl. Opt. 51, 1037-1044 (2012)

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