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Improved algorithm for phase-to-height mapping in phase measuring profilometry |
Applied Optics, Vol. 51, Issue 8, pp. 1149-1155 (2012)
http://dx.doi.org/10.1364/AO.51.001149
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Abstract
An improved algorithm for phase-to-height mapping in phase-measuring profilometry (PMP) is proposed, in which the phase-to-height mapping relationship is no longer restricted to the condition that the optical axes of the imaging system must be orthogonal to the reference plane in the basic PMP. Only seven coefficients independent of the coordinate system need to be calibrated, and the system calibration can be accomplished using only two different gauge blocks, instead of more than three different standard planes. With the proposed algorithm, both the phase measurement and system calibration can be completed simultaneously, which makes the three-dimensional (3-D) measurement faster and more flexible. Experiments have verified its feasibility and validity.
© 2012 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(150.6910) Machine vision : Three-dimensional sensing
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: November 15, 2011
Revised Manuscript: December 22, 2011
Manuscript Accepted: December 23, 2011
Published: March 8, 2012
Citation
Yanshan Xiao, Yiping Cao, and Yingchun Wu, "Improved algorithm for phase-to-height mapping in phase measuring profilometry," Appl. Opt. 51, 1149-1155 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-8-1149
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