OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 8 — Mar. 10, 2012
  • pp: 1162–1170

Three-dimensional measuring technique for surface topography using a light-sectioning microscope

Linglin Xia, Peifeng Chen, Ying Wang, Le Zhou, and Xi Luo  »View Author Affiliations


Applied Optics, Vol. 51, Issue 8, pp. 1162-1170 (2012)
http://dx.doi.org/10.1364/AO.51.001162


View Full Text Article

Enhanced HTML    Acrobat PDF (891 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Three-dimensional (3D) surface topographic analysis, measurement, and assessment techniques have raised great interest not only among researchers but also among industrial users. Many industrial processes and applications are directly influenced by the small-scale roughness of surface finishes. This paper describes the development and implementation of a noncontact, three-dimensional, microtopography measuring system. The instrument is formed by combining a modified light-sectioning microscope subsystem with a computer subsystem. In particular, optical system characteristics of the light-sectioning microscope are investigated, and a textured steel sheet is measured to demonstrate good practical outcomes. Details of measuring processes and image processing algorithms are provided, such as procedures for measurement, image edge extraction, and 3D topography reconstruction. After the 3D topography of the measured surface has been reconstructed, the topography field description parameters are calculated. A standard roughness block was used for calibration of the surface microtopography measuring system. Results obtained showed the measurement method output has good agreement with the actual asperity (unevenness or roughness) of the surface. The computer subsystem is used to process and control asperity measurements and image generation, and for image acquisition and presentation.

© 2012 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 28, 2011
Revised Manuscript: December 13, 2011
Manuscript Accepted: December 13, 2011
Published: March 8, 2012

Virtual Issues
Vol. 7, Iss. 5 Virtual Journal for Biomedical Optics

Citation
Linglin Xia, Peifeng Chen, Ying Wang, Le Zhou, and Xi Luo, "Three-dimensional measuring technique for surface topography using a light-sectioning microscope," Appl. Opt. 51, 1162-1170 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-8-1162


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. M. Bennett and J. H. Dancy, “Stylus profiling instrument for measuring statistical properties of smooth optical surfaces,” Appl. Opt. 20, 1785–1802 (1981). [CrossRef]
  2. F. Chen, G. M. Brown, and M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10–22 (2000). [CrossRef]
  3. D. J. Whitehouse, “Surface metrology,” Meas. Sci. Technol. 8, 955–972 (1997). [CrossRef]
  4. R. J. Hocken, N. Chakraborty, and C. Brown, “Optical metrology of surfaces,” CIRP Ann. 54, 169–183 (2005). [CrossRef]
  5. B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of surface topography of magnetic tapes by Mirau interferometry,” Appl. Opt. 24, 1489–1497 (1985). [CrossRef]
  6. P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002). [CrossRef]
  7. K. J. Stout and L. Blunt, Three-Dimensional Surface Topography2nd ed., (Penton, 2000).
  8. A. Bogner, P. H. Jouneau, G. Thollet, D. Basset, and C. Gauthies, “A history of scanning electron microscopy,” Micron 38, 390–401 (2007). [CrossRef]
  9. G. Binnig and H. Rohrer, “Scanning tunneling microscope,” Surf. Sci. 126, 236–244 (1983). [CrossRef]
  10. D. Rugar and P. K. Hansma, “Atomic force microscopy,” Phys. Today 43, 23–30 (1990). [CrossRef]
  11. G. Schmaltz, Technische Oberflächenkunde (Springer-Verlag, 1936), p. 73.
  12. W. Wang and P. L. Wong, “The dynamic measurement of surface topography using a light-section technique,” TriboTest 9, 305–316 (2003). [CrossRef]
  13. S. Uchida, H. Sato, and M. Ohori, “Two-dimensional measurement of surface roughness by the light sectioning method,” CIRP Ann. 28, 419–423 (1979).
  14. J. Loomis, A. Lightman, A. Poe, and R. Caldwell, “Automated dimensional analysis using a light-sectioning microscope,” Proc. SPIE 1036, 88–99 (1988).
  15. M. F. M. Costa, “Surface inspection by an optical triangulation method,” Opt. Eng. 35, 2743 (1996). [CrossRef]
  16. M. Kiran, B. Ramamoorthy, and V. Radhakrishnan, “Evaluation of surface roughness by vision system,” Int. J. Mach. Tools Manuf. 38, 685–690 (1998). [CrossRef]
  17. O. B. Abouelatta, “3D surface roughness measurement using a light sectioning vision system,” Lect. Notes Comput. Sci. Eng. 2183(1), 698–703 (2010).
  18. H. Weber, “Propagation of higher-order intensity moments in quadratic-index media,” Opt. Quantum Electron. 24, S1027–S1049 (1992). [CrossRef]
  19. X. Luo, Y. Wang, C. Peifeng, and L. Zhou, “Investigation of CO2 laser beam modulation by rotating polygon,” Opt. Lasers Eng. 49, 132–136 (2011). [CrossRef]
  20. D. Y. Yim and S. W. Kim, “Optimum sampling interval for Ra roughness measurement,” Proc. Inst. Mech. Eng. 205, 139–142 (1991).
  21. H. R. Tizhoosh, “Fast fuzzy edge detection,” in Proceedings of Fuzzy Information Processing Society (2002), pp. 239–242.
  22. M. R. Stytz and G. Frieder, “Three-dimensional medical imaging: algorithms and computer systems,” ACM Comput. Surv. 23, 421–499 (1991). [CrossRef]
  23. H. L. Mitchell and P. L. Houtekamer, “An adaptive ensemble Kalman filter,” Mon. Weather Rev. 128, 416–433 (2000). [CrossRef]
  24. R. C. Gonzalez and R. E. Woods, Digital Image Processing(Addison-Wesley, 1992).
  25. F. Pernkopf, “3D surface acquisition and reconstruction for inspection of raw steel products,” Comput. Ind. 56, 876–885 (2005). [CrossRef]
  26. A. Gruen and D. Akca, “Least squares 3D surface and curve matching,” J. Photogramm. Remote Sens. 59, 151–174(2005). [CrossRef]
  27. “Geometrical product specifications (GPS)—surface texture: profile method—metrological characteristics of phase correct filters,” ISO 11562 (International Organization for Standardization, 1996).
  28. L. Blunt and X. Jiang, “Advanced techniques for assessment surface topography: development of a basis for the 3D surface texture standards,” in SURFSTAND, 1st ed. (Kogan Page Science, 2003), pp. 17–40.
  29. X. Jiang, P. J. Scott, D. J. Whitehouse, and L. Blunt, “Paradigm shifts in surface metrology. Part II. the current shift,” Proc. R. Soc. A 463, 2071–2099 (2007). [CrossRef]
  30. “Geometrical product specifications (GPS)—surface texture: areal—Part 2: terms, definitions and surface texture parameters,” ISO/DIS 25178-2 (International Organization for Standardization, 2006).
  31. P. J. Scott, “An algorithm to extract critical points from lattice height data,” Int. J. Mach. Tools Manuf. 41, 1889–1897 (2001). [CrossRef]
  32. M. Pfestorf, U. Engel, and M. Geiger, “3D-surface parameters and their application on deterministic textured metal sheets,” Int. J. Mach. Tools Manuf. 38, 607–614 (1998). [CrossRef]
  33. M. Vermeulen and J. Scheers, “Micro-hydrodynamic effects in EBT textured steel sheet,” Int. J. Mach. Tools Manuf. 41, 1941–1951 (2001). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited