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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 9 — Mar. 20, 2012
  • pp: 1209–1215

Spectroscopic ellipsometry studies on various zinc oxide films deposited by ion beam sputtering at room temperature

Jin-Cherng Hsu, Yung-Hsin Lin, Paul W. Wang, and Yu-Yun Chen  »View Author Affiliations

Applied Optics, Vol. 51, Issue 9, pp. 1209-1215 (2012)

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Various zinc oxide films were deposited by ion-beam sputter deposition (IBSD) under different oxygen partial pressures (PO2) at room temperature. The as-deposited ZnO films fabricated at PO2>1.0×10−4  Torr had poly-crystalline structures to absorb water on the surface at ambient condition. Simultaneously, the film surfaces were covered and smoothed by the surface layers formed with the water, hydroxyl (OH) groups, and ZnO materials investigated by X-ray photoelectron spectroscopy (XPS). When the compositions of the surface layers were used in a multilayer fitting model of spectroscopic ellipsometry, the actual optical refractive index of the ZnO film deposited at PO2=1.2×10−4  Torr was found to be about 1.9618 at λ=550  nm.

© 2012 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Original Manuscript: November 8, 2011
Revised Manuscript: December 30, 2011
Manuscript Accepted: January 2, 2012
Published: March 14, 2012

Jin-Cherng Hsu, Yung-Hsin Lin, Paul W. Wang, and Yu-Yun Chen, "Spectroscopic ellipsometry studies on various zinc oxide films deposited by ion beam sputtering at room temperature," Appl. Opt. 51, 1209-1215 (2012)

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