|
Opaque optics thickness measurement using a cyclic path optical configuration setup and polarization phase shifting interferometry |
Applied Optics, Vol. 51, Issue 9, pp. 1352-1356 (2012)
http://dx.doi.org/10.1364/AO.51.001352
Enhanced HTML 
Acrobat PDF (355 KB)
Abstract
Thickness measurement of an opaque optics using a cyclic path optical configuration (CPOC) setup and polarization phase shifting interferometry (PPSI) is presented. The CPOC setup is used to simultaneously focus two orthogonally polarized counterpropagating converging beams at its hypotenuse arm. The opaque optics is placed at the hypotenuse arm of the CPOC setup such that one of its surfaces reflects back one of the counterpropagating focusing beams. Because of the thickness of the opaque optics, the other focusing beam suffers a longitudinal shift in the beam focus. Applying PPSI, the longitudinal shift in the beam focus which is twice the thickness of the opaque optics is determined. The results obtained for a silicon plate of thickness 0.660 mm with a measurement uncertainty of 0.013 mm are presented.
© 2012 Optical Society of America
OCIS Codes
(120.1680) Instrumentation, measurement, and metrology : Collimation
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(260.5430) Physical optics : Polarization
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: September 8, 2011
Revised Manuscript: November 15, 2011
Manuscript Accepted: November 23, 2011
Published: March 15, 2012
Citation
Y. Pavan Kumar and Sanjib Chatterjee, "Opaque optics thickness measurement using a cyclic path optical configuration setup and polarization phase shifting interferometry," Appl. Opt. 51, 1352-1356 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-9-1352
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Interferometer for Small-Angle Measurement Based on Total Internal Reflection (AO)
- Testing of Rod Objects by Grazing-Incidence Interferometry: Experiment (AO)
- Improved Angle Interferometer Based on Total Internal Reflection (AO)
- Digital Speckle-Pattern Interferometry: Fringe Retrieval for Large In-Plane Deformations With Digital Speckle Photography (AO)
- Simultaneous determination of refractive index and thickness of moderately thick plane-parallel transparent glass plates using cyclic path optical configuration setup and a lateral shearing interferometer (AO)
Related Conference Papers
- Metrology for the Space Interferometry Mission
- High Sensitivity Vibration Measurements with Absolute Calibration
- Application of Frequency Combs for Precision Measurement of Refractive Index of Air
- High Flux Atom Lasers, Interferometry and the Shot Noise Limit
- Ultra Stable Semiconductor Laser Current Source
« Previous Article | Next Article »
OSA is a member of 