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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 1 — Jan. 1, 2013
  • pp: 1–8

Computerized interferometric surface measurements [Invited]

James C. Wyant  »View Author Affiliations

Applied Optics, Vol. 52, Issue 1, pp. 1-8 (2013)

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The addition of electronics, computers, and software to interferometry has enabled enormous improvements in optical metrology. This paper discusses four areas in which computerized interferometric measurement improvements have been made in the measurement of surface shape and surface roughness: (a) The use of computer-generated holograms for the testing of aspheric optics, (b) phase-shifting interferometry for getting interferometric data into a computer so the data can be analyzed, (c) computerized interference microscopes, including multiple-wavelength and coherence scanning, for the precision measurement of surface microstructure, and (d) vibration-insensitive dynamic interferometers for enabling precise measurements in noncontrolled environments.

© 2012 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

Original Manuscript: September 24, 2012
Manuscript Accepted: September 25, 2012
Published: December 21, 2012

Virtual Issues
(2013) Advances in Optics and Photonics

James C. Wyant, "Computerized interferometric surface measurements [Invited]," Appl. Opt. 52, 1-8 (2013)

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  1. H. D. Polster, J. Pastor, R. M. Scott, R. Crane, P. H. Langenbeck, R. Pilston, and G. Steinberg, “New developments in interferometry,” Appl. Opt. 8, 521–556 (1969). [CrossRef]
  2. J. C. Wyant and A. J. MacGovern, “Computer generated holograms for testing aspheric optical elements,” Applications de L’Holographie, Laboratoire de Physique Generale et Optique (Universite de Besancon, 1970), pp. 13–18.
  3. A. J. MacGovern and J. C. Wyant, “Computer generated holograms for testing optical elements,” Appl. Opt. 10, 619–624 (1971). [CrossRef]
  4. J. C. Wyant and V. P. Bennett, “Using computer generated holograms to test aspheric wavefronts,” Appl. Opt. 11, 2833–2839 (1972). [CrossRef]
  5. D. Malacara, K. Creath, J. Schmit, and J. C. Wyant, “Testing of aspheric wavefronts and surfaces,” in Optical Shop Testing, D. Malacara, ed. (Wiley, 2007), pp. 477–488.
  6. B. Dorband and H. J. Tiziani, “Testing aspheric surfaces with computer generated holograms: analysis of adjustment and shape errors,” Appl. Opt. 24, 2604–2611 (1985). [CrossRef]
  7. J. Schwider, “Interferometric tests for aspherics,” in Fabrication and Testing of Aspheres, M. Taylor, M Piscotty, and A. Lindquist, eds., Vol. 24 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper T3.
  8. C. Pruss, S. Reichelt, H. J. Tiziani, and W. Olsen, “Computer-generated holograms in interferometric testing,” Opt. Eng. 43, 2534–2540 (2004). [CrossRef]
  9. P. Zhou and J. H. Burge, “Fabrication error analysis and experimental demonstration for computer-generated holograms,” Appl. Opt. 46, 657–663 (2007). [CrossRef]
  10. A. F. Fercher, “Computer-generated holograms for testing optical elements: error analysis and error compensation,” Opt. Acta 23, 347–365 (1976). [CrossRef]
  11. A. Ono and J. C. Wyant, “Plotting errors measurement of CGH using an improved interferometric method,” Appl. Opt. 23, 3905–3910 (1984). [CrossRef]
  12. A. Ono and J. C. Wyant, “Aspherical mirror testing using a CGH with small errors,” Appl. Opt. 24, 560–563(1985). [CrossRef]
  13. J. C. Wyant, P. K. O’Neill, and A. J. MacGovern, “Interferometric method of measuring plotter distortion,” Appl. Opt. 13, 1549–1551 (1974). [CrossRef]
  14. M. Beyerlein, N. Lindlein, and J. Schwider, “Dual-wave-front computer-generated holograms for quasi-absolute testing of aspherics,” Appl. Opt. 41, 2440–2447 (2002). [CrossRef]
  15. S. Reichelt, C. Pruss, and H. J. Tiziani, “Absolute interferometric test of aspheres by use of twin computer-generated holograms,” Appl. Opt. 42, 4468–4479 (2003). [CrossRef]
  16. S. M. Arnold and R. Kestner, “Verification and certification of CGH aspheric nulls,” Proc. SPIE 2536, 117–126 (1995). [CrossRef]
  17. Y.-C. Chang and J. H. Burge, “Error analysis for CGH optical testing,” Proc. SPIE 3782, 358–366 (1999). [CrossRef]
  18. J. C. Wyant and P. K. O’Neill, “Computer generated hologram: null lens test of aspheric wavefronts,” Appl. Opt. 13, 2762–2765 (1974). [CrossRef]
  19. P. Carré, “Installation et utilisation du comparateur photoelectrigue et Interferentiel du Bureau International de Poids ek Measures,” Metrologia 2, 13–23 (1966). [CrossRef]
  20. R. Crane, “Interference phase measurement,” Appl. Opt. 8, 538–542 (1969).
  21. J. C. Wyant, “Double frequency grating lateral shear interferometer,” Appl. Opt. 12, 2057–2060 (1973). [CrossRef]
  22. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wavefront measuring interferometer for testing optical surfaces and lenses,” Appl. Opt. 13, 2693–2703 (1974). [CrossRef]
  23. J. C. Wyant, “Use of an ac heterodyne lateral shear interferometer with real-time wavefront correction systems,” Appl. Opt. 14, 2622–2626 (1975). [CrossRef]
  24. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, “Digital wave-front measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421–3432 (1983). [CrossRef]
  25. J. W. Hardy, J. Feinleib, and J. C. Wyant, “Real time phase correction of optical imaging systems,” presented at OSA Topical Meeting on Optical Propagation through Turbulence, Boulder, Colorado, 9–11 July 1974.
  26. B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of surface topography of magnetic tapes by Mirau interferometry,” Appl. Opt. 24, 1489–1497 (1985). [CrossRef]
  27. J. C. Wyant, “Optical profilers for surface roughness,” Proc. SPIE 525, 174–180 (1985). [CrossRef]
  28. J. C. Wyant and K. Creath, “Advances in interferometric optical profiling,” Int. J. Mach. Tools Manufact. 32, 5–10 (1992). [CrossRef]
  29. J. C. Wyant and K. Creath, “Two-wavelength phase-shifting interferometer and method,” U.S. patent 4,832,489 (23May1989).
  30. Y.-Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt. 23, 4539–4543 (1984). [CrossRef]
  31. Y.-Y. Cheng and J. C. Wyant, “Multiple-wavelength phase-shifting interferometry,” Appl. Opt. 24, 804–807 (1985). [CrossRef]
  32. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” Proc. SPIE 775, 233–247 (1987). [CrossRef]
  33. T. Dresel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef]
  34. P. J. Caber, “An interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438–3441 (1993). [CrossRef]
  35. F. Gao, R. K. Leach, J. Petzing, and J. M. Coupland, “Surface measurement errors using commercial scanning white light interferometers,” Meas. Sci. Technol. 19, 015303(2008). [CrossRef]
  36. R. K. Leach, C. L. Giusca, and J. M. Coupland, “Advances in calibration methods for micro- and nanoscale surfaces,” Proc. SPIE 8430, 84300H (2012). [CrossRef]
  37. M. Takeda, H. Ina, and S. Kabayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160 (1982). [CrossRef]
  38. K. H. Womack, “Interferometric phase measurement using spatial synchronous detection,” Proc. SPIE 429, 8–15 (1983).
  39. O. Y. Kwon, “Multichannel phase shifted interferometer,” Opt. Lett. 9, 59–61 (1984). [CrossRef]
  40. C. L. Koliopoulos, “Simultaneous phase-shift interferometer,” Proc. SPIE 1531, 119–128 (1991).
  41. M. Takeda, Q. Gu, M. Kinoshita, H. Takai, and Y. Takahashi, “Frequency-multiplex Fourier-transform profilometry: a single shot three-dimensional shape measurement of objects with large height discontinuities and/or surface isolations,” Appl. Opt. 36, 5347–5354 (1997). [CrossRef]
  42. J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, “Pixelated phase-mask dynamic interferometer,” Proc. SPIE 5531, 304–314 (2004). [CrossRef]
  43. J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, “Instantaneous phase-shift, point-diffraction interferometer,” Proc. SPIE 5531, 264–272 (2004). [CrossRef]
  44. M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. C. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005). [CrossRef]
  45. N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE 5875, 58750F (2005). [CrossRef]
  46. S. Suja Helen, M. P. Kothiyal, and R. S. Sirohi, “Achromatic phase-shifting by a rotating polarizer,” Opt. Commun. 154, 249–254 (1998). [CrossRef]
  47. B. Kimbrough and J. Millerd, “The spatial frequency response and resolution limitations of pixelated mask spatial carrier based phase shifting interferometry,” Proc. SPIE 7790, 77900K (2010). [CrossRef]
  48. D. M. Sykora and P. de Groot, “Instantaneous measurement Fizeau interferometer with high spatial resolution,” Proc. SPIE 8126, 812610 (2011).
  49. B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low coherence vibration insensitive Fizeau interferometer,” Proc. SPIE 6292, 62920F (2006).

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