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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 1 — Jan. 1, 2013
  • pp: 1–8

Computerized interferometric surface measurements [Invited]

James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 52, Issue 1, pp. 1-8 (2013)
http://dx.doi.org/10.1364/AO.52.000001


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Abstract

The addition of electronics, computers, and software to interferometry has enabled enormous improvements in optical metrology. This paper discusses four areas in which computerized interferometric measurement improvements have been made in the measurement of surface shape and surface roughness: (a) The use of computer-generated holograms for the testing of aspheric optics, (b) phase-shifting interferometry for getting interferometric data into a computer so the data can be analyzed, (c) computerized interference microscopes, including multiple-wavelength and coherence scanning, for the precision measurement of surface microstructure, and (d) vibration-insensitive dynamic interferometers for enabling precise measurements in noncontrolled environments.

© 2012 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

History
Original Manuscript: September 24, 2012
Manuscript Accepted: September 25, 2012
Published: December 21, 2012

Virtual Issues
(2013) Advances in Optics and Photonics

Citation
James C. Wyant, "Computerized interferometric surface measurements [Invited]," Appl. Opt. 52, 1-8 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-1-1


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