OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 10 — Apr. 1, 2013
  • pp: 2042–2048

Absolute distance measurement using frequency-sweeping heterodyne interferometer calibrated by an optical frequency comb

Xuejian Wu, Haoyun Wei, Hongyuan Zhang, Libing Ren, Yan Li, and Jitao Zhang  »View Author Affiliations


Applied Optics, Vol. 52, Issue 10, pp. 2042-2048 (2013)
http://dx.doi.org/10.1364/AO.52.002042


View Full Text Article

Enhanced HTML    Acrobat PDF (941 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present a frequency-sweeping heterodyne interferometer to measure an absolute distance based on a frequency-tunable diode laser calibrated by an optical frequency comb (OFC) and an interferometric phase measurement system. The laser frequency-sweeping process is calibrated by the OFC within a range of 200 GHz and an accuracy of 1.3 kHz, which brings about a precise temporal synthetic wavelength of 1.499 mm. The interferometric phase measurement system consisting of the analog signal processing circuit and the digital phase meter achieves a phase difference resolution better than 0.1 deg. As the laser frequency is sweeping, the absolute distance can be determined by measuring the phase difference variation of the interference signals. In the laboratory condition, our experimental scheme realizes micrometer accuracy over meter distance.

© 2013 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 29, 2013
Revised Manuscript: February 14, 2013
Manuscript Accepted: February 25, 2013
Published: March 22, 2013

Citation
Xuejian Wu, Haoyun Wei, Hongyuan Zhang, Libing Ren, Yan Li, and Jitao Zhang, "Absolute distance measurement using frequency-sweeping heterodyne interferometer calibrated by an optical frequency comb," Appl. Opt. 52, 2042-2048 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-10-2042


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. E. Manske, G. Jäge, T. Hausotte, and R. Füßl, “Recent developments and challenges of nanopositioning and nanomeasuring technology,” Meas. Sci. Technol. 23, 074001 (2012). [CrossRef]
  2. G. Cella and A. Giazotto, “Invited review article: interferometric gravity wave detectors,” Rev. Sci. Instrum. 82, 101101(2011). [CrossRef]
  3. N. A. Massie, R. D. Nelson, and S. Holly, “High-performance real-time heterodyne interferometry,” Appl. Opt. 18, 1797–1803 (1979). [CrossRef]
  4. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wavefront measuring interferometer for testing optical surfaces and lenses,” Appl. Opt. 13, 2693–2703 (1974). [CrossRef]
  5. M. T. L. Hsu, I. C. M. Littler, D. A. Shaddock, J. Herrmann, R. B. Warrington, and M. B. Gray, “Subpicometer length measurement using heterodyne laser interferometry and all-digital rf phase meters,” Opt. Lett. 35, 4202–4204 (2010). [CrossRef]
  6. R. Jang, C.-S. Kang, J.-A. Kim, J. W. Kim, J.-E. Kim, and H. Y. Park, “High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique,” Appl. Opt. 50, 1541–1547 (2011). [CrossRef]
  7. R. Dändliker, R. Thalmann, and D. Prongué, “Two-wavelength laser interferometry using superheterodyne detection,” Opt. Lett. 13, 339–341 (1988). [CrossRef]
  8. R. Dändliker, K. Hug, J. Politch, and E. Zimmermann, “High-accuracy distance measurements with multiple-wavelength interferometry,” Opt. Eng. 34, 2407–2412 (1995). [CrossRef]
  9. K. Falaggis, D. P. Towers, and C. E. Towers, “Multiwavelength interferometry: extended range metrology,” Opt. Lett. 34, 950–952 (2009). [CrossRef]
  10. X. Dai and K. Seta, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol. 9, 1031–1035 (1998). [CrossRef]
  11. J. A. Stone, A. Stejskal, and L. Howard, “Absolute interferometry with a 670-nm external cavity diode laser,” Appl. Opt. 38, 5981–5994 (1999). [CrossRef]
  12. J. Jin, Y.-J. Kim, Y. Kim, S.-W. Kim, and C.-S. Kang, “Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser,” Opt. Express 14, 5968–5974 (2006). [CrossRef]
  13. N. Schuhler, Y. Salvadé, S. Lévêque, R. Dändliker, and R. Holzwarth, “Frequency-comb-referenced two-wavelength source for absolute distance measurement,” Opt. Lett. 31, 3101–3103 (2006). [CrossRef]
  14. Y. Salvadé, N. Schuhler, S. Lévêque, and S. L. Floch, “High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source,” Appl. Opt. 47, 2715–2720 (2008). [CrossRef]
  15. S. Hyun, Y.-J. Kim, Y. Kim, J. Jin, and S.-W. Kim, “Absolute length measurement with the frequency comb of a femtosecond laser,” Meas. Sci. Technol. 20, 095302 (2009). [CrossRef]
  16. A. Cabral and J. Rebordão, “Accuracy of frequency-sweeping interferometry for absolute distance metrology,” Opt. Eng. 46, 073602 (2007). [CrossRef]
  17. K. Falaggis, D. P. Towers, and C. E. Towers, “Method of excess fractions with application to absolute distance metrology: theoretical analysis,” Appl. Opt. 50, 5484–5498 (2011). [CrossRef]
  18. X. Wu, J. Zhang, H. Wei, and Y. Li, “Phase-shifting interferometer using a frequency-tunable diode laser calibrated by an optical frequency comb,” Rev. Sci. Instrum. 83, 073107 (2012). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited