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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 10 — Apr. 1, 2013
  • pp: 2145–2152

Heterodyne laser Doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters

Yanlu Li, Steven Verstuyft, Gunay Yurtsever, Shahram Keyvaninia, Gunther Roelkens, Dries Van Thourhout, and Roel Baets  »View Author Affiliations

Applied Optics, Vol. 52, Issue 10, pp. 2145-2152 (2013)

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Miniaturized laser Doppler vibrometers (LDVs) have many advantages over conventional bulk LDVs. In this paper, the realization of a miniaturized heterodyne LDV integrated on silicon-on-insulator substrate is reported. The optical frequency shifters in these on-chip LDVs employ a serrodyne technique, and they generate a frequency shift at 2 kHz. Vibrations of a mirror for the frequency range between 1.1 and 123 Hz and the velocity range between 0.8 and 400μm/s are measured by both an on-chip LDV and a commercial LDV. The measurement results agree well. A compensation method for the influence of on-chip spurious reflections is also demonstrated.

© 2013 Optical Society of America

OCIS Codes
(120.7250) Instrumentation, measurement, and metrology : Velocimetry
(130.0130) Integrated optics : Integrated optics

ToC Category:
Integrated Optics

Original Manuscript: June 20, 2012
Revised Manuscript: November 2, 2012
Manuscript Accepted: January 28, 2013
Published: March 29, 2013

Yanlu Li, Steven Verstuyft, Gunay Yurtsever, Shahram Keyvaninia, Gunther Roelkens, Dries Van Thourhout, and Roel Baets, "Heterodyne laser Doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters," Appl. Opt. 52, 2145-2152 (2013)

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