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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 12 — Apr. 20, 2013
  • pp: 2750–2760

Dynamic symmetrical pattern projection based laser triangulation sensor for precise surface position measurement of various material types

Klemen Žbontar, Matjaž Mihelj, Boštjan Podobnik, Franc Povše, and Marko Munih  »View Author Affiliations

Applied Optics, Vol. 52, Issue 12, pp. 2750-2760 (2013)

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This paper describes a custom, material-type-independent laser-triangulation-based measurement system that utilizes a high-quality ultraviolet laser beam. Laser structuring applications demand material surface alignment regarding the laser focus position, where fabrication conditions are optimal. Robust alignment of various material types was solved by introducing dynamic symmetrical pattern projection, and a “double curve fitting” centroid detection algorithm with subsurface scattering compensation. Experimental results have shown that the measurement system proves robust to laser intensity variation, with measurement bias lower than 50 μm and standard deviation lower than ± 6.3 μm for all materials. The developed probe has been integrated into a PCB prototyping system for material referencing purposes.

© 2013 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(140.3610) Lasers and laser optics : Lasers, ultraviolet
(150.5670) Machine vision : Range finding
(280.3400) Remote sensing and sensors : Laser range finder
(150.1135) Machine vision : Algorithms
(150.3045) Machine vision : Industrial optical metrology

ToC Category:
Machine Vision

Original Manuscript: November 1, 2012
Revised Manuscript: February 27, 2013
Manuscript Accepted: March 8, 2013
Published: April 17, 2013

Klemen Žbontar, Matjaž Mihelj, Boštjan Podobnik, Franc Povše, and Marko Munih, "Dynamic symmetrical pattern projection based laser triangulation sensor for precise surface position measurement of various material types," Appl. Opt. 52, 2750-2760 (2013)

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