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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 16 — Jun. 1, 2013
  • pp: 3662–3670

Coherence scanning interferometry: linear theory of surface measurement

Jeremy Coupland, Rahul Mandal, Kanik Palodhi, and Richard Leach  »View Author Affiliations

Applied Optics, Vol. 52, Issue 16, pp. 3662-3670 (2013)

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The characterization of imaging methods as three-dimensional (3D) linear filtering operations provides a useful way to compare the 3D performance of optical surface topography measuring instruments, such as coherence scanning interferometry, confocal and structured light microscopy. In this way, the imaging system is defined in terms of the point spread function in the space domain or equivalently by the transfer function in the spatial frequency domain. The derivation of these characteristics usually involves making the Born approximation, which is strictly only applicable to weakly scattering objects; however, for the case of surface scattering, the system is linear if multiple scattering is assumed to be negligible and the Kirchhoff approximation is assumed. A difference between the filter characteristics derived in each case is found. However this paper discusses these differences and explains the equivalence of the two approaches when applied to a weakly scattering object.

© 2013 Optical Society of America

OCIS Codes
(070.0070) Fourier optics and signal processing : Fourier optics and signal processing
(090.0090) Holography : Holography
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.0180) Microscopy : Microscopy
(240.0240) Optics at surfaces : Optics at surfaces
(290.0290) Scattering : Scattering

ToC Category:

Original Manuscript: December 21, 2012
Revised Manuscript: April 4, 2013
Manuscript Accepted: April 15, 2013
Published: May 22, 2013

Virtual Issues
Vol. 8, Iss. 7 Virtual Journal for Biomedical Optics

Jeremy Coupland, Rahul Mandal, Kanik Palodhi, and Richard Leach, "Coherence scanning interferometry: linear theory of surface measurement," Appl. Opt. 52, 3662-3670 (2013)

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