OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 16 — Jun. 1, 2013
  • pp: 3726–3731

Profile measurement of glass sheet using multiple wavelength backpropagation interferometry

Samuel Choi, Kohei Otsuki, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations

Applied Optics, Vol. 52, Issue 16, pp. 3726-3731 (2013)

View Full Text Article

Enhanced HTML    Acrobat PDF (791 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Multiple-wavelength backpropagation interferometry based on a spectral interferometer is proposed for measuring thin glass sheets with nanometer accuracy. The multiwavelength backpropagation method introduced to the spectral interferometer eliminates time-encoded wavelength sweeping and mechanical scanning, which enables high-speed profile measurements. The applicability of the proposed method is experimentally demonstrated through cross-sectional profile and vibrating surface displacement measurements of a glass sheet.

© 2013 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 23, 2013
Revised Manuscript: April 20, 2013
Manuscript Accepted: April 21, 2013
Published: May 27, 2013

Samuel Choi, Kohei Otsuki, Osami Sasaki, and Takamasa Suzuki, "Profile measurement of glass sheet using multiple wavelength backpropagation interferometry," Appl. Opt. 52, 3726-3731 (2013)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. Post, “Moiré interferometry with white light,” Appl. Opt. 18, 4163–4167 (1979). [CrossRef]
  2. L. Deck and P. de Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334–7338 (1994). [CrossRef]
  3. S. W. Kim and G. H. Kim, “Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt. 38, 5968–5973 (1999). [CrossRef]
  4. M. C. Li, D. S. Wan, and C. C. Lee, “Application of white-light scanning interferometer on transparent thin-film measurement,” Appl. Opt. 51, 8579–8586 (2012). [CrossRef]
  5. A. F. Fercher, C. K. Hitzenberger, G. Kamp, and S. Y. El-Zaiat, “Measurement of intraocular distances by backscattering spectral interferometry,” Opt. Commun. 117, 43–48 (1995). [CrossRef]
  6. G. Hausler and M. W. Lindner, “‘Coherence radar’ and ‘spectral radar’-new tools for dermatological diagnosis,” J. Biomed. Opt. 3, 21–23 (1998). [CrossRef]
  7. M. Wojtkowski, T. Bajraszewski, P. Targowski, and A. Kowalczyk, “Real-time in vivo imaging by high-speed spectral optical coherence tomography,” Opt. Lett. 28, 1745–1747 (2003). [CrossRef]
  8. H. Ren, T. Sun, D. J. MacDonald, M. J. Cobb, and X. Li, “Real-time in vivo blood-flow imaging by moving scatterer-sensitive spectral-domain optical Doppler tomography,” Opt. Lett. 31, 927–929 (2006). [CrossRef]
  9. P. Bu, X. Wang, and O. Sasaki, “Dynamic full-range Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry,” Opt. Eng. 46, 105603 (2007). [CrossRef]
  10. P. Bu, X. Wang, and O. Sasaki, “Full-range parallel Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry,” J. Opt. A 9, 422–426 (2007). [CrossRef]
  11. O. Sasaki and K. Takahashi, “Sinusoidal phase modulating interferometer using optical fibers for displacement measurement,” Appl. Opt. 27, 4139–4142 (1988). [CrossRef]
  12. O. Sasaki, H. Tai, and T. Suzuki, “Step-profile measurement by backpropagation of multiple-wavelength optical field,” Opt. Lett. 32, 2683–2685 (2007). [CrossRef]
  13. O. Sasaki and H. Okazaki, “Analysis of measurement accuracy in sinusoidal phase modulating interferometry,” Appl. Opt. 25, 3152–3158 (1986). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited