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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 16 — Jun. 1, 2013
  • pp: 3726–3731

Profile measurement of glass sheet using multiple wavelength backpropagation interferometry

Samuel Choi, Kohei Otsuki, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations


Applied Optics, Vol. 52, Issue 16, pp. 3726-3731 (2013)
http://dx.doi.org/10.1364/AO.52.003726


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Abstract

Multiple-wavelength backpropagation interferometry based on a spectral interferometer is proposed for measuring thin glass sheets with nanometer accuracy. The multiwavelength backpropagation method introduced to the spectral interferometer eliminates time-encoded wavelength sweeping and mechanical scanning, which enables high-speed profile measurements. The applicability of the proposed method is experimentally demonstrated through cross-sectional profile and vibrating surface displacement measurements of a glass sheet.

© 2013 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 23, 2013
Revised Manuscript: April 20, 2013
Manuscript Accepted: April 21, 2013
Published: May 27, 2013

Citation
Samuel Choi, Kohei Otsuki, Osami Sasaki, and Takamasa Suzuki, "Profile measurement of glass sheet using multiple wavelength backpropagation interferometry," Appl. Opt. 52, 3726-3731 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-16-3726


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References

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