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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 24 — Aug. 20, 2013
  • pp: 5957–5961

Vibration insensitive extended range interference microscopy

Joshua T. Wiersma and James C. Wyant  »View Author Affiliations

Applied Optics, Vol. 52, Issue 24, pp. 5957-5961 (2013)

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Using a simultaneous phase sensor, the proposed instrument performs highly repeatable measurements over an extended range in the presence of vibration common to a laboratory setting. Measurement of a 4.5 μm step standard in the presence of vibration amplitudes of 40 nm produces a repeatability of 1.5 nm RMS with vertical scanning data acquired at 400 nm intervals. The outlined method demonstrates the potential to tolerate larger vibration amplitudes up to or beyond a quarter wavelength and to increase the data acquisition step size to that approaching the depth of field of standard microscope imaging systems.

© 2013 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(180.3170) Microscopy : Interference microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 11, 2013
Revised Manuscript: May 29, 2013
Manuscript Accepted: July 23, 2013
Published: August 14, 2013

Virtual Issues
Vol. 8, Iss. 9 Virtual Journal for Biomedical Optics

Joshua T. Wiersma and James C. Wyant, "Vibration insensitive extended range interference microscopy," Appl. Opt. 52, 5957-5961 (2013)

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