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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 26 — Sep. 10, 2013
  • pp: 6512–6522

Fourier domain optical tool normalization for quantitative parametric image reconstruction

Jing Qin, Richard M. Silver, Bryan M. Barnes, Hui Zhou, and Francois Goasmat  »View Author Affiliations


Applied Optics, Vol. 52, Issue 26, pp. 6512-6522 (2013)
http://dx.doi.org/10.1364/AO.52.006512


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Abstract

There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer-scale changes has been observed when measuring critical dimensions of subwavelength 20 nm features or when imaging defects below 15 nm using angle-resolved and focus-resolved optical data. However, these methods inherently involve complex imaging optics and analysis of complicated three-dimensional electromagnetic fields. This paper develops a new approach to enable the rigorous analysis of three-dimensional, through-focus, or angle-resolved optical images. We use rigorous electromagnetic simulation with enhanced Fourier optical techniques, an approach to optical tool normalization, and statistical methods to evaluate sensitivities and uncertainties in the measurement of subwavelength three-dimensional structures.

© 2013 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 10, 2013
Manuscript Accepted: June 16, 2013
Published: September 5, 2013

Citation
Jing Qin, Richard M. Silver, Bryan M. Barnes, Hui Zhou, and Francois Goasmat, "Fourier domain optical tool normalization for quantitative parametric image reconstruction," Appl. Opt. 52, 6512-6522 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-26-6512

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