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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 26 — Sep. 10, 2013
  • pp: 6607–6615

Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique

Pei Huang, Yan Li, Haoyun Wei, Libing Ren, and Shijie Zhao  »View Author Affiliations

Applied Optics, Vol. 52, Issue 26, pp. 6607-6615 (2013)

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This paper presents a method for measuring five-degrees-of-freedom errors of a moving stage with a monolithic prism and phase-sensitive detection technique. It consists of a pigtailed laser diode, three position-sensitive detectors (PSDs), a monolithic prism, and additional optical and electronic components. The monolithic prism mounted on the moving stage generates three beams that are detected by three PSDs, respectively, so that the straightness, pitch, yaw, and roll errors can be simultaneously measured. Theoretical analysis of each error measurement process is presented. To reduce the influence of disturbing light, the laser diode is modulated by a sinusoidal wave current, and a phase-sensitive detection technique is developed to demodulate the signals. Compared with a laser interferometer, the deviation errors when measuring the horizontal and vertical straightness errors are better than ±0.25 and ±0.4μm, respectively. The deviation errors for the pitch, yaw, and roll are better than ±0.5, ±0.3, and ±2arcsec, respectively, in comparison with an autocollimator. The system can be assembled to measure five error components of machine tools in an industrial environment.

© 2013 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.1680) Instrumentation, measurement, and metrology : Collimation
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 16, 2013
Revised Manuscript: August 14, 2013
Manuscript Accepted: August 17, 2013
Published: September 9, 2013

Pei Huang, Yan Li, Haoyun Wei, Libing Ren, and Shijie Zhao, "Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique," Appl. Opt. 52, 6607-6615 (2013)

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  1. H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008). [CrossRef]
  2. R. Ramesh, M. A. Mannan, and A. N. Poo, “Error compensation in machine tools—a review: Part I: geometric, cutting-force induced and fixture-dependent errors,” Int. J. Mach. Tools Manuf. 40, 1235–1256 (2000). [CrossRef]
  3. J. Ni, “CNC machine accuracy enhancement through real-time error compensation,” Manuf. Sci. Eng. 119, 717–725 (1997). [CrossRef]
  4. P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35, 725–738 (1995). [CrossRef]
  5. J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).
  6. C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005). [CrossRef]
  7. C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997). [CrossRef]
  8. K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38, 155–164 (1998). [CrossRef]
  9. C. Kuang, E. Hong, and J. Ni, “A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques,” Rev. Sci. Instrum. 78, 095105 (2007). [CrossRef]
  10. C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005). [CrossRef]
  11. C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22, 105901 (2011). [CrossRef]
  12. C. H. Liu, H. L. Huang, and H. W. Lee, “Five-degrees-of-freedom diffractive laser encoder,” Appl. Opt. 48, 2767–2777 (2009). [CrossRef]
  13. Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol. 34, 287–292 (2002). [CrossRef]
  14. Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).
  15. Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36, 279–283 (2004). [CrossRef]
  16. K. C. Fan and Y. Zhao, “A laser straightness measurement system using optical fiber and modulation techniques,” Int. J. Mach. Tools Manufact. 40, 2073–2081 (2000). [CrossRef]
  17. J. Ni and S. M. Wu, “An on-line measurement technique for machine volumetric error compensation,” J. Eng. Ind. 115, 85–92 (1993). [CrossRef]

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