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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 27 — Sep. 20, 2013
  • pp: 6834–6839

Theoretical and experimental study of a catadioptric compensator for an aspheric surface

Yudong Zhang, Yongqian Wu, and Bin Fan  »View Author Affiliations


Applied Optics, Vol. 52, Issue 27, pp. 6834-6839 (2013)
http://dx.doi.org/10.1364/AO.52.006834


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Abstract

A new type of catadioptric compensator is established. The tolerance values of lens spacing, lens thickness, and tilt in mounting are about three times higher than that of the Offner compensator. They overcome the localization of the Offner compensator, improve the test validity, and reduce the test risk of system detection by cross-validation with existing means. The performance of the catadioptric compensator is verified in experiments and theoretically.

© 2013 Optical Society of America

OCIS Codes
(220.1140) Optical design and fabrication : Alignment
(220.1250) Optical design and fabrication : Aspherics
(220.4840) Optical design and fabrication : Testing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: May 23, 2013
Revised Manuscript: July 23, 2013
Manuscript Accepted: July 26, 2013
Published: September 20, 2013

Citation
Yudong Zhang, Yongqian Wu, and Bin Fan, "Theoretical and experimental study of a catadioptric compensator for an aspheric surface," Appl. Opt. 52, 6834-6839 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-27-6834


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References

  1. R. Zhang, C. Yang, and Q. Xu, “Precision analyses of a stitching interferometer testing system,” Appl. Opt. 45, 2399–2403 (2006). [CrossRef]
  2. W. Li, X. Su, and Z. Liu, “Large-scale three-dimensional object measurement: a practical coordinate mapping and image data-patching method,” Appl. Opt. 40, 3326–3333 (2001). [CrossRef]
  3. A. Offner, “A null corrector for paraboloidal mirrors,” Appl. Opt. 2, 153–155 (1963). [CrossRef]
  4. D. Malacara, Optical Shop Testing (Wiley, 1978).
  5. J. R. Moya and J. E. A. Landgrave, “Third-order design of refractive Offner compensators,” Appl. Opt. 26, 2667–2672 (1987). [CrossRef]
  6. J. M. Sasian, “Optimum configuration of the Offner null corrector: testing an F/1 paraboloid,” Proc. SPIE 1164, 8–17 (1989). [CrossRef]
  7. J. H. Burge, W. Davison, C. Zhao, and H. M. Martin, “Development of surface metrology for the Giant Magellan Telescope primary mirror,” in Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, E. Atad-Ettedgui and D. Lemke, ed. (SPIE, 2008).
  8. Y. Zhang, “New family of 1∶1 catadioptric broadband deep-UV high-NA lithography lenses,” in Symposium on Microlithography (SPIE, 1991).
  9. Y. Zhang, “Excimer laser photolithography with a 1∶1 broadband catadioptric optics,” in Symposium on Microlithography (SPIE, 1991).
  10. Y. Zhang, “1∶1 catadioptric optical system,” Chinese patent, No. 89103586.9 (May23, 1989).

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